在現今之半導體製造業裡，對於元件的微小化，製造的尺寸也越來越小，因此，對於半導體製程控制之要求也越來越精準。對黃光製程來說來說，目前面臨的困境為產品少量多樣，影響製程穩定性的變數太多，導致在製程的控制上的不容易。
在本文我們將利用變異數分析的原理建立模型，並用此模型來對付目前生產線上最常見的問題即產品少量多樣所造成的製程偏差，我們對工廠的數據進行分析動作，並利用此方法希望能夠對製程上的誤差進行修正的動作，以期能夠有效的修正製程偏差。

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