失效模式與效應分析（Failure Modes and Effects Analysis, FMEA）之方法廣泛應用於半導體製程改善活動，用來預測及防止失效的發生。其中所使用的風險優先數（Risk Priority Number, RPN）是作為判斷失效模式對系統影響程度的依據。找出真正的風險優先數，明定風險順序，提供決策者做最正確的判決，可以避免不必要的改善浪費及錯失真正高風險危機的改善時機。但在傳統的RPN方法有重複性太高、無法比較SOD(Severity , Occurrence , Detection)的順序權重、及沒有考慮到各項目中的失效模式與失效原因的直接與間接的關係等問題。因此本研究提出一套方法，結合灰關聯分析法（Grey Relational Analysis, GRA）與決策實驗室分析法 (Decision Making Trial and Evaluation Laboratory, DEMATEL)，用以解決傳統RPN風險排序問題。此方法先藉由GRA修正風險優先數，找出SOD的順序權重並降低RPN重複率；再藉由DEMATEL來排序風險優先順序以改善失效模式與失效原因間的直接與非直接關聯，使風險排序越趨近於真實需求。最後本研究將此方法應用於兩個半導體實際案例以管制計劃書執行結果成效來檢驗此方法的有效性，並與傳統 RPN方法比較，提供決策者較合理的參考資訊。

Failure Mode and Effects Analysis Method (FMEA) is widely used in the semiconductor process improvement activities, including the Risk priority number (RPN) which is used to determine the impact of failure mode on the system basis. The risk priority number supports decision-makers to make the correct judgment to avoid unnecessary waste on improvement and missed opportunity to improve the high-risk crisis. But the traditional RPN method has high repetition, ineffective order comparison on Severity, Occurrence, Detection (SOD), and no account for the failure modes of each project and the failure causes, such as direct and indirect relationships. Therefore, this study proposes a method that combines Grey Relational Analysis (GRA) and Decision Making Trial and Evaluation Laboratory (DEMATEL), to solve the problem of the traditional RPN. This methodfirst uses GRA method to revise the risk priority number. In order to find the right weight between SOD and reduce RPN repetition rate; it sorts by DEMATEL method to improve the direct and indirect relationship between Failure Mode and Cause of Failure, thereby bringing the risk more close to the real needs. Finally, his method applies to two real semiconductor process improvement cases. The effectiveness evaluation through the Control Plan confirms the validity of this method which performs better than the traditional RPN, and provides more reasonable information for decision-makers as a reference.

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