本論文研究照光輔助熱製程對溶膠-凝膠法(sol-gel)鍍製BiFeO3鐵電薄膜添加釓(Gd)、鉻(Cr)的光化學效應。本實驗室學姊研究證實光化學效應可以應用於鐵酸鉍薄膜上並提升其電性，又許多文獻提及共摻雜之鐵酸鉍薄膜對於性質的改良，因此本次實驗結合兩者，並且探討其不同摻雜條件對光化學效應的影響及光化學效應對於結晶行為及電性的可能作用機制。
由個別元素之溶液的UV-Vis光譜得知在三種光源(Hal、UVA、UVC)之吸收強度趨勢中，預期於混合溶液中增加Bi元素及減少Cr元素比例有助於UVC光吸收強度提升，因此薄膜成分參數設定兩種: (X組)Bi0.9Gd0.1Fe0.975Cr0.025O3; 及(Y組)Bi0.9*Gd0.1Fe0.98Cr0.02O3(補償10% Bi，減少Cr成份比)，比較對增強UVC照光效應趨勢。
FTIR分析結果中，發現UVC照光輔助熱製程可以加速薄膜有機物與氮化物分解，尤以Y組分解情況明顯比X組良好，可以證實UVC光的照光效應受到摻雜條件影響；從EDS成分分析中發現，經UVC光照光輔助的薄膜經焦化處理後，較能保留鉍元素避免因形成金屬態鉍後高溫揮發，可以預期晶體結構形成會較為完善。拉曼分析中，發現經UVC照光輔助熱製程的薄膜有助於晶體結構的形成(rhombohedrally distorted perovskite)，對應到XRD與SEM表面樣貌發現結晶度明顯提升之趨勢，應有助於鐵電極化與漏電流性質的改良。
另一方面，XPS分析發現，經UVC照光輔助熱製程的薄膜，有助於摻雜元素進入其取代位置(Gd取代Bi，Cr取代Fe)，越多Gd、Cr共摻雜會使(110)(1ī0)之優選方向更為明顯，此優選方向亦能改善鐵電極化與鐵磁性質。
根據各項分析結果與參考相關文獻，不同的吸光強度可能影響到光源與薄膜之間的效應，並且推測本研究之薄膜在溶膠-凝膠製程中受短紫外光(UVC)光照產生化學效應，促進薄膜內部有機物與氮化物分解，加速成核並在退火時得到較佳結晶性，助於晶體結構的形成，進而影響其電性與磁性的表現。

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