微加速度計、微陀螺儀等微慣性感測元件的性能優劣，取決於機械元件設計與製作及周邊電路驅動及感測系統的整合，優異的感測電路與信號處理電路可補償大多數機械系統上因製程限制所造成的缺陷。而電容方式因能夠與積體電路之製程匹配、消耗功率小、量測穩定度較高、及介電常數穩定等特性，使電容式感測被微慣性感測元件廣為使用。但如何有效的整合感測、機械結構與訊號處理電路，減少量測上的誤差，是目前微慣性元件在應用上所極需解決的難題。
本論文的目的是藉由HSPICE設計與模擬微慣性元件之驅動與感測電路。因絕大部分之微慣性感測元件皆採靜電驅動及電容感測之模式，故本論文將研發一個具高解析度、準確度的電容感測器(電容電壓轉換 Capacitance-Voltage Converter)，期望能檢測出極小的電容變化值，並設計介面電路(A/D converter)以輸入訊號至後端的微控制器，確保微慣性感測元件所需之性能。

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