本論文利用多層催化金屬層合成單層奈米碳管(SWNTs)，合成方法為高溫熱裂解化學氣相沉積法(Thermal CVD)，成長溫度為900°C，碳源氣體為甲烷(methane)。我們藉由有系統的變化多層催化金屬組合，來研究各金屬層在成長SWNTs時所扮演的角色，並利用掃描式電子顯微鏡(SEM)、穿透式電子顯微鏡(TEM)、及微拉曼光譜儀(micro-Raman spectroscopy)來定義SWNTs特性，實驗結果顯示Al支撐層(Al supporting layer)對於合成SWNTs扮演極關鍵角色，Mo和Fe催化劑共同作用，可以有效拓寬合成SWNTs的製程視窗，並增加SWNTs的產率。更進一步地，我們利用原子力顯微鏡 (Atomic force microscope，AFM )、歐傑電子光譜分析(Auger electron spectrometer，AES)、X光光電子能譜術(X-ray photoelectron spectroscopy，XPS)來分析多層催化金屬層，並提出SWNTs的合成模型。最後我們利用兩段式製程法，即將試片先經由電漿處理，形成Si的奈米尖椎，催化劑會位於其頂端，然後將試片送入高溫爐合成，而成長出懸掛式SWNTs，實驗結果顯示此製程所合成的懸掛式SWNTs，具有較高品質，並較有機會形成單根SWNTs。本論文的研究是為了將來運用於碳管電晶體(CNT-FETs)上的製作。

In this paper, the high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate in thermal chemical vapor deposition of methane. The roles of multilayered metal catalyst were investigated by systematically varying the combination of multilayered structure. The scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), and micro-Raman spectroscopy were used for characterization. It was found that aluminum supporting layer was very crucial in synthesizing high-purity SWNTs. A thin molybdenum layer in collaboration with an ultra-thin iron catalyst was found very effective in extending the operation window of SWNTs synthesis. The investigation of radial breathing mode (RBM) and the G-band/D-band intensities by micro-Raman measurements would further reveal the strong dependence of the diameter distribution of SWNTs on the different combinations of multilayered structure. An optimized combination was found Mo(0.2 nm)/Fe(1 nm)/ Al(10 nm) on silicon substrate, in which the peak of RBM was sharp and IG/ID ratio was at least 20 from micro-Raman analysis. Furthermore, the Auger electron spectrometer (AES) analysis was utilized to examine the evolution of the depth profile of multilayered structure due to the pre-treatment, which would lead to the examination of the role of each layer. The result of these investigations would be presented and discussed.

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