現代半導體工業已經發展到了奈米的尺度了，其中最常見的就是場效電晶體(FET)，電晶體的閘極間距已達到90nm，但相對於FET 的展，光學微影的進度卻很少，尤其在50nm 以下，對於光學微影已經是達到了物理極限，但是對於元件製作才是另一個新世界的開始，世人都在期待一個革命性的的技術，以達成奈米元件製作的工具。
掃瞄穿隧式電子顯微鏡(STM)不僅是觀測微小尺度下物體的工具，還有其他相當多的應用，本論文為利用掃瞄穿隧電子顯微鏡來製作奈米級的結構，即俗稱的SPM nanolithography，其中分為兩個部分：(1) 於大氣中利用探針在金屬(Ti)表面加上相對於探針為正的偏壓，讓探針所在處產生氧化物，這種氧化過程稱為電場導致氧化反應(Field-induced oxidation)，若再加上化學濕蝕刻方法將未氧化的鈦去除，藉由此氧化反應可以製做出奈米尺度的圖樣，如此即可獲得類似光學微影中正光阻的凸出圖樣。並討論其形成大小、形狀和脈衝電壓、持續時間的關係；(2)以及在雲母表面上鍍200nm 的金薄膜，於水溶液中利用探針上吸附的銅原子，由於銅和金之間的吸引力比銅和銅之間的吸引力還強，藉著輕微的機械性碰撞(jump-to-contact)，讓銅原子留在金的表面上，形成奈米級的結構。
不論在大氣(氧化)系統還是水溶液(還原)，依照理論的預估以及實驗的對照，所製做出的奈米結構都已經達到我們所期望的，對於其尺寸、分佈、位置的控制，都能在我們的掌握下進行。STM 奈米微影技術可應用於各種不同的環境、基材，不僅能觀測在奈米尺度下發生的現象，也對於在未來的奈米光電元件製作，提供了一個有效、自由度高的利器。

The transistor has evolved into the nanoscale device. The most common form is a simple switch the field effect transistor (FET). The modern FET qualifies as a nanoscale device since the length of the gate region is only 90nm .The FET has slowly evolved through improvement in optical lithography. We all await the technology set that will push these devices below the classical limits and on to the world of devices that relies on the quantum behavior of electrons. That transition will take place when the device dimensions are reduced below 50nm. It is a world beyond the reach for optical lithography. Devices with these dimensions will require a revolutionary change in the fabrication process.
Scanning Tunneling Microscope (STM) not only the observed tool, but also have a lot of application. In this paper, we use STM for fabrication nanoscale structures. It’s also called SPM nanolithography. The paper divided into two parts: (1) Using the STM tip to oxidize metal (Ti) film in the atmosphere. Appling the positive pulse to the
sample, and the position of tip will have oxide growth. This oxidation process is Field-induced oxidation. After the field-induced oxidation of titanium, and remove the
unoxidation regions by 5% HF. The titanium dioxide become the metal mask, likes the positive photoresist in optical lithography. And we discus the structure with oxidation parameter ;(2) Using the mica coating with 200nm gold film, and let STM tip covered with copper atom. The interaction between copper and gold is stronger than the interaction between copper and copper. By a little mechanical contact
(jump-to-contact), the copper atoms will stay on the gold surface.
No matter in atmosphere (oxidation) or solution (reduction) system. We can get nano-structure under the size control, distribution control and position control by STM. SPM nanolithography can applied for difference environments and substrate.
Not only can observe the phenomenon in nanoscale, but also provide a powerful tool for the nanodevice fabrication.

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