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研究生： 李立宇
Li, Li-Yu
論文名稱： 使用爐管擴散製作異質接面矽晶太陽能電池
Fabrication of Silicon Heterojunction Solar Cells Using Furnace Diffusion Technology
指導教授： 王立康
Wang, Li-Karn
口試委員:
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年： 2010
畢業學年度： 98
語文別： 中文
論文頁數： 85
中文關鍵詞： 異質接面 、太陽能電池 、爐管擴散 、矽晶 、非晶矽 、鈍化 、透明導電膜
外文關鍵詞： heterojunction, solar cell, Furnace Diffusion, amorphous silicon, passivation, high-low junction, ITO
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    • 本研究的重點有二項，第一，用ITO來當太陽能電池的抗反射層(Anti-Reflection Coating)，利用調控製程參數，在最佳化製程參數，以符合其太陽能電池之抗反射層的需求。第二，我們在此提出一新架構，以傳統平面無絨面(Texture)的矽晶太陽能電池為基礎，利用高溫石英爐管進行擴散，讓太陽能電池的效率有所提升。

    目錄 第一章 序論……………………………………………………………………… 1 1.1 研究背景………………………………………………………………1 1.2 太陽能電池發展現況…………………………………………………1 1.3 文獻回顧………………………………………………………………3 1.4 研究動機………………………………………………………………6 1.5 論文概要………………………………………………………………6 第二章 研究理論……………………………………………………………………8 2.1 太陽能源概論…………………………………………………………8 2.1-1太陽能光譜………………………………………………………9 2.2 基本半導體物理……………………………………………………11 2.2-1晶體結構…………………………………………………………11 2.2-2光吸收……………………………………………………………12 2.2-3半導體摻雜………………………………………………………14 2.2-4同質接面與異質接面……………………………………………17 2.2-5電子電洞的復合…………………………………………………17 2.3 太陽能電池基本原理………………………………………………19 2.3-1 光伏特效應……………………………………………………19 2.3-2 太陽電池工作原理……………………………………………19 2.3-3 太陽能電池等效電路…………………………………………21 2.3-4 太陽能電池基本參數…………………………………………23 2.4 效率損失來源………………………………………………………26 2.4-1 寄生電阻………………………………………………………26 2.4-2 溫度的影響……………………………………………………28 2.4-3 光學損失………………………………………………………29 2.4-4 復合損失………………………………………………………31 2.5 透明導電薄膜………………………………………………………33 2.5-1 透明導電薄膜基本特性………………………………………33 2.5-2 ITO導電特性……………………………………………………34 2.5-3 ITO光學特性……………………………………………………36 第三章 研究方法與製程步驟……………………………………………………38 3.1 實驗方法……………………………………………………………38 3.2 透明導電薄膜………………………………………………………38 3.2-1 ITO靶材…………………………………………………………38 3.2-2 ITO濺鍍製程流程………………………………………………39 3.2-3 ITO薄膜退火處理………………………………………………42 3.2-4 ITO薄膜分析……………………………………………………43 3.3 太陽能電池結構與製程……………………………………………43 3.3-1太陽能電池結構與研究方法……………………………………43 3.3-2 太陽能電池製程步驟…………………………………………44 3.4 實驗機台……………………………………………………………47 3.4-1低壓化學氣相沈積………………………………………………47 3.4-2 電漿輔助化學氣相沉積系統…………………………………48 3.4-3 高溫石英爐管擴散爐…………………………………………49 3.4-4 真空直流濺鍍系統……………………………………………50 3.4-5 真空退火爐管…………………………………………………51 3.4-6 電子束蒸鍍系統………………………………………………52 3.4-7 四點探針………………………………………………………53 3.4-8 紫外光與可見光光譜儀………………………………………54 3.4-9 拉曼光譜量測系統……………………………………………54 3.4-10 展阻量測系統…………………………………………………55 第四章 數據分析與結果討論……………………………………………………56 4.1 ITO薄膜數據分析與討論……………………………………………56 4.1-1 工作壓力………………………………………………………56 4.1-2 直流電壓………………………………………………………58 4.1-3 真空退火………………………………………………………59 4.1-4 結果與討論……………………………………………………63 4.2 異質矽晶太陽能電池數據分析與討論……………………………65 4.2-1 爐管擴散時間…………………………………………………65 4.2-2 非晶矽之爐管擴散……………………………………………69 4.2-3 異質接面矽晶太陽能電池……………………………………72 4.2-4 結果與討論……………………………………………………79 第五章 結論………………………………………………………………………81 參考文獻……………………………………………………………………………82

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