本研究目的在於建立奈米碳管/氧化鋁雙層薄片的製程步驟，並針對其場發射性質研究討論；同時以奈米碳管/氧化鋁雙層薄片為基礎，改良手持式大氣電漿產器，提升場發式電漿產生系統的工業潛力。
本研究以熱裂解化學氣相沉積成長具有高準直性的奈米碳管陣列，並以氫氟酸掀離得到奈米碳管/氧化鋁雙層薄片。奈米碳管/氧化鋁雙層薄片除了擁有奈米碳管本身的優異性質外，還保持了奈米碳管陣列其高方向性、高準質性的特質。
奈米碳管/氧化鋁雙層薄片具有起始電場僅1.0 V/μm的優異場發射性質，本研究也提出藉由使陣列傾斜，再施以外加電場後以靜電力吸引傾斜尖端，進而減少屏蔽效應的作法，有效的使起始電場下降33.3 %，達到場發射性質提升。
手持式大氣電漿產生器改良部分，包含以本研究製備之奈米碳管/氧化鋁雙層薄片作為電漿產生器陰極，以改良電極材料；以及提出一個更小、更安全、且包含水冷系統的大氣電漿產生裝置雛型機，使大氣電漿產生系統更加完備。
本研究結果可期待於未來來看到更多基於奈米碳管/氧化鋁雙層薄片其陣列高準直特性的延伸應用；也可望於未來建立一套基於使準直陣列傾斜進而提升場發射特性的完整製程；場發式電漿產生系統也逐漸成形並朝商品化方向發展，可以期待未來於工業應用展露頭角。

The purpose of this study is to establish the process of the carbon nanotube/alumina double-layer sheet, and to discuss its field emission properties. Also, based on carbon nanotube/alumina double-layer sheet, the hand-held atmospheric plasma generator is improved to enhance industrial potential of field emission system.
Well-aligned carbon nanotube arrays were successfully grown by chemical vapor deposition, and obtained the carbon nanotube/alumina double-layer sheet by using hydrofluoric acid lift-off. Commendably, the double-layer sheet, with excellent properties of a carbon nanotube, maintained the well-alignment of the carbon nanotube array.
The turn-on field of carbon nanotube/alumina double-layer sheet is as low as 1.0 V/μm. A novel way was proposed to improve the field emission properties by flattening the array. During the field emission experiments, the carbon nanotubes would be pulled by electrostatic force. Therefore, there were some tips as the field emission sites which was generated on the sheet and pointed vertically to the anode to reduce the screening effect. The result show that the turn-on field drop by 33.3 % and improve the field emission property.
Finally, carbon nanotube/alumina double-layer sheet was used as cathode of the plasma generator to improve the electrode material. Also a new prototype atmospheric plasma generator was designed, which is smaller, safer and loaded with water cooling system, to make the process more stable.
In this study, it’s expected that more extended applications based on the well-aligned double-layer sheets can be seen in the future. The efficient process based on flattening carbon nanotube array and improving field emission property is also believed to be established in the future. The improvement of the field emission atmospheric plasma generating system is gradually complete and becomes an industrial product, which is expected to show its prominence in industrial applications in the future.

[1] S. Iijima, "Helical microtubules of graphitic carbon," Nature, vol. 354, p. 56, 1991.
[2] H. W. Kroto, J. R. Heath, S. C. O'Brien, R. F. Curl, and R. E. Smalley, "C60: Buckminsterfullerene," Nature, vol. 318, p. 162, 1985.
[3] Q.-M. Zhang, J.-Y. Yi, and J. Bernholc, "Structure and dynamics of solid C 60," Physical Review Letters, vol. 66, p. 2633, 1991.
[4] S. Iijima and T. Ichihashi, "Single-shell carbon nanotubes of 1-nm diameter," Nature, vol. 363, p. 603, 1993.
[5] W. Kim, H. C. Choi, M. Shim, Y. Li, D. Wang, and H. Dai, "Synthesis of ultralong and high percentage of semiconducting single-walled carbon nanotubes," Nano Letters, vol. 2, p. 703, 2002.
[6] A. Kis and A. Zettl, "Nanomechanics of carbon nanotubes," Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol. 366, p. 1591, 2008.
[7] E. G. Gamaly and T. W. Ebbesen, "Mechanism of carbon nanotube formation in the arc discharge," Physical Review B, vol. 52, p. 2083, 1995.
[8] J.-H. Park, S. Pammi, H.-J. Jung, T.-Y. Cho, and S.-G. Yoon, "ITO/CNT nano composites as a counter electrode for the dye-sensitized solar cella pplications," Journal of the Korean Institute of Electrical and Electronic Material Engineers, vol. 24, p. 76, 2011.
[9] M. Yudasaka, T. Komatsu, T. Ichihashi, and S. Iijima, "Single-wall carbon nanotube formation by laser ablation using double-targets of carbon and metal," Chemical Physics Letters, vol. 278, p. 102, 1997.
[10] S. Arepalli, "Laser ablation process for single-walled carbon nanotube production," Journal of Nanoscience and Nanotechnology, vol. 4, p. 317, 2004.
[11] G. D. Nessim, "Properties, synthesis, and growth mechanisms of carbon nanotubes with special focus on thermal chemical vapor deposition," Nanoscale, vol. 2, p. 1306, 2010.
[12] Y. Chen, Z. L. Wang, J. S. Yin, D. J. Johnson, and R. Prince, "Well-aligned graphitic nanofibers synthesized by plasma-assisted chemical vapor deposition," Chemical Physics Letters, vol. 272, p. 178, 1997.
[13] M. Meyyappan, L. Delzeit, A. Cassell, and D. Hash, "Carbon nanotube growth by PECVD: a review," Plasma Sources Science and Technology, vol. 12, p. 205, 2003.
[14] Q. Liang, Q. Li, D. Chen, D. Zhou, B. Zhang, and Z. Yu, "Carbon nanotube prepared in the atmosphere of partial oxidation of methane," Chemical Journal of Chinese Universities-Chinese, vol. 21, p. 623, 2000.
[15] R. Baker, M. Barber, P. Harris, F. Feates, and R. Waite, "Nucleation and growth of carbon deposits from the nickel catalyzed decomposition of acetylene," Journal of Catalysis, vol. 26, p. 51, 1972.
[16] A. Oberlin, M. Endo, and T. Koyama, "Filamentous growth of carbon through benzene decomposition," Journal of Crystal Growth, vol. 32, p. 335, 1976.
[17] A. Gordon, E. Molinelli, and T. Baker, "Large‐scale relative dynamic topography of the Southern Ocean," Journal of Geophysical Research: Oceans, vol. 83, p. 3023, 1978.
[18] T. Baird, J. Fryer, and B. Grant, "Carbon formation on iron and nickel foils by hydrocarbon pyrolysis—reactions at 700 ℃," Carbon, vol. 12, p. 591, 1974.
[19] K. Jiang, Q. Li, and S. Fan, "Nanotechnology: Spinning continuous carbon nanotube yarns," Nature, vol. 419, p. 801, 2002.
[20] M. Miao, J. McDonnell, L. Vuckovic, and S. C. Hawkins, "Poisson’s ratio and porosity of carbon nanotube dry-spun yarns," Carbon, vol. 48, p. 2802, 2010.
[21] M. Zhang, S. Fang, A. A. Zakhidov, S. B. Lee, A. E. Aliev, C. D. Williams, K. R. Atkinson, R. H. Baughman, "Strong, transparent, multifunctional, carbon nanotube sheets," Science, vol. 309, p. 1215, 2005.
[22] Q. Li, C. Liu, Y.-H. Lin, L. Liu, K. Jiang, and S. Fan, "Large-strain, multiform movements from designable electrothermal actuators based on large highly anisotropic carbon nanotube sheets," ACS Nano, vol. 9, p. 409, 2015.
[23] A. A. Kuznetzov, S. B. Lee, M. Zhang, R. H. Baughman, and A. A. Zakhidov, "Electron field emission from transparent multiwalled carbon nanotube sheets for inverted field emission displays," Carbon, vol. 48, p. 41, 2010.
[24] A. F. Gilvaei, K. Hirahara, and Y. Nakayama, "In-situ study of the carbon nanotube yarn drawing process," Carbon, vol. 49, p. 49285, 2011.
[25] C. P. Huynh and S. C. Hawkins, "Understanding the synthesis of directly spinnable carbon nanotube forests," Carbon, vol. 48, p. 1105, 2010.
[26] T. Iijima, H. Oshima, Y. Hayashi, U. Suryavanshi, A. Hayashi, and M. Tanemura, "Morphology control of a rapidly grown vertically aligned carbon‐nanotube forest for fiber spinning," Physica Status Solidi (a), vol. 208, p. 2332, 2011
[27] J.-H. Kim, H.-S. Jang, K. H. Lee, L. J. Overzet, and G. S. Lee, "Tuning of Fe catalysts for growth of spin-capable carbon nanotubes," Carbon, vol. 48, p. 538, 2010.
[28] X. Zhang, K. Jiang, C. Feng, P. Liu, L. Zhang, J. Kong, T. Zhang, Q. Li, S. Fan, "Spinning and processing continuous yarns from 4‐inch wafer scale super‐aligned carbon nanotube arrays," Advanced Materials, vol. 18, p. 1505, 2006.
[29] D. Jung, J.-h. Kim, K. H. Lee, L. J. Overzet, and G. S. Lee, "Effects of pre-annealing of Fe catalysts on growth of spin-capable carbon nanotubes," Diamond and Related Materials, vol. 38, p. 87, 2013.
[30] H.-H. Li, G.-J. Yuan, B. Shan, X.-X. Zhang, H.-P. Ma, Y.-Z. Tian, H.-L. Lu and J. Liu, "Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays," Nanoscale Research Letters, vol. 14, p. 119, 2019.
[31] K. H. Lee, D. W. Jung, D. Burk, L. J. Overzet, and G. S. Lee, "Effect of acetylene concentration and thermal ramping rate on the growth of spin-capable carbon nanotube forests," Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 30, p. 41809, 2012.
[32] K. Liu, P. Liu, K. Jiang, and S. Fan, "Effect of carbon deposits on the reactor wall during the growth of multi-walled carbon nanotube arrays," Carbon, vol. 45, p. 2379, 2007.
[33] J. Lee, E. Oh, H.-J. Kim, S. Cho, T. Kim, S. Lee, J. P. Hee, J. Kim , K.-H. Lee, "The reason for an upper limit to the height of spinnable carbon nanotube forests," Journal of Materials Science, vol. 48, p. 6897, 2013.
[34] Y. Li, Y. Sun, and J. Yeow, "Nanotube field electron emission: principles, development, and applications," Nanotechnology, vol. 26, p. 242001, 2015.
[35] R. H. Fowler and L. Nordheim, "Electron emission in intense electric fields," Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol. 119, p. 173, 1928.
[36] J. He, P. Cutler, and N. Miskovsky, "Generalization of Fowler–Nordheim field emission theory for nonplanar metal emitters," Applied Physics Letters, vol. 59, p. 1644, 1991.
[37] K. Jensen and E. Zaidman, "Field emission from an elliptical boss: Exact versus approximate treatments," Applied Physics Letters, vol. 63, p. 702, 1993.
[38] K. Jensen and E. Zaidman, "Field emission from an elliptical boss: Exact and approximate forms for area factors and currents," Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, vol. 12, p. 776, 1994.
[39] K. Jensen and E. Zaidman, "Analytic expressions for emission characteristics as a function of experimental parameters in sharp field emitter devices," Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, vol. 13, p. 511, 1995.
[40] T. Fisher, "Influence of nanoscale geometry on the thermodynamics of electron field emission," Applied Physics Letters, vol. 79, p. 3699, 2001.
[41] D. H. Shin, K. N. Yun, S.-G. Jeon, J.-I. Kim, Y. Saito, W. I. Milne, C. J, Lee, "High performance field emission of carbon nanotube film emitters with a triangular shape," Carbon, vol. 89, p. 404, 2015.
[42] L. Nilsson, O. Groening, C. Emmenegger, O. Kuettel, E. Schaller, L. Schlapbach, L. Schlapbach, "Scanning field emission from patterned carbon nanotube films," Applied Physics Letters, vol. 76, p. 2071, 2000.
[43] J. S. Suh, K. S. Jeong, J. S. Lee, and I. Han, "Study of the field-screening effect of highly ordered carbon nanotube arrays," Applied Physics Letters, vol. 80, p. 2392, 2002.
[44] R. Smith and S. Silva, "Maximizing the electron field emission performance of carbon nanotube arrays," Applied Physics Letters, vol. 94, p. 133104, 2009.
[45] W. Crookes, "On radiant matter," Journal of the Franklin Institute, vol. 108, p. 305, 1879.
[46] L. Tonks, "Oscillations in ionized gases," Plasma and Oscillations, vol. 14, p. 122, 1928
[47] M. Druyvesteyn and F. M. Penning, "The mechanism of electrical discharges in gases of low pressure," Reviews of Modern Physics, vol. 12, p. 87, 1940.
[48] J. T. Gudmundsson, "On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study," Plasma Sources Science and Technology, vol. 10, p. 76, 2001.
[49] G. Selwyn, H. Herrmann, J. Park, and I. Henins, "Materials Processing Using an Atmospheric Pressure, RF‐Generated Plasma Source," Contributions to Plasma Physics, vol. 41, p. 610, 2001.
[50] A. Schutze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks, "The atmospheric-pressure plasma jet: a review and comparison to other plasma sources," IEEE Transactions on Plasma Science, vol. 26, p. 1685, 1998.
[51] B. Eliasson and U. Kogelschatz, "Nonequilibrium volume plasma chemical processing," IEEE Transactions on Plasma science, vol. 19, p. 1063, 1991.
[52] F. Paschen, "Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche Potentialdifferenz," Annalen der Physik, vol. 273, p. 69, 1889.
[53] P. Fauchais and A. Vardelle, "Thermal plasmas," IEEE Transactions on Plasma Science, vol. 25, p. 1258, 1997.
[54] J.-S. Chang, P. A. Lawless, and T. Yamamoto, "Corona discharge processes," IEEE Transactions on Plasma Science, vol. 19, p. 1152, 1991.
[55] U. Reitz, J. Salge, and R. Schwarz, "Pulsed barrier discharges for thin film production at atmospheric pressure," Surface and Coatings Technology, vol. 59, p. 144, 1993.
[56] J. Jeong, S. Babayan, V. Tu, J. Park, I. Henins, R. Hicks, G. S. Selwyn, "Etching materials with an atmospheric-pressure plasma jet," Plasma Sources Science and Technology, vol. 7, p. 282, 1998.
[57] Y.-Y. Chen, "Study on the field emission enhanced handheld atmospheric pressure plasma jet based on nano-carbon materials by MPCVD," Masters Dissertation, National Tsing Hua University, 2017.
[58] K. E. Spear and J. P. Dismukes, "Synthetic diamond: emerging CVD science and technology," John Wiley & Sons, vol. 25, 1994.