目前微機電系統中常見的致動方式為靜電致動與熱致動，但其操作方式都有位移量過小或操作溫度高等本質上的問題尚待解決。因此本論文提出一種不同的磁致動方法，利用磁化軟磁性材料的方式來使其產生對應的磁極分布，由磁極間的交互作用產生靜磁力。並可改變外加磁場方向而改變元件的磁極分布，而使元件能分別有吸力與斥力兩種不同的靜磁力輸出，其中斥力更是其他非磁致動方式所難以達到的。此外，本論文所提之磁致動器能成功的在液體中操作。本論文針對因磁化產生的靜磁力以及元件受力變形關係進行理論推導，並透過微機電製程針對此致動概念設計製造出測試元件，且由測試元件的驅動測試得到與理論推導具有相同趨勢的結果。

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