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研究生: 吳智傑
Chih-Chieh, Wu
論文名稱: 偏振移相式點繞射干涉儀研製
Analysis and Experimental Study of Polarized Phase-shifting Point-diffraction Interferometer
指導教授: 王培仁
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 75
中文關鍵詞: 點繞射干涉儀移相法偏振澤爾尼克多項式
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  • 近年來光學產業發展迅速,如數位相機、手機相機等,皆有往微小化、輕薄化的趨勢前進,為了配合此類精密光學的發展,為了在重量減低的情況下達到相同的成像品質,塑膠透鏡的生產是必然之途徑,而如何快速、簡易、低成本的設計、製造、量測和修正的技術成為業界發展的重要關鍵,本文將針對於標準平凸透鏡進行探討,嘗試以點繞射干涉儀作為透鏡檢測平台,共光路式的點繞射干涉儀能夠去除震動、空氣擾動等環境影響,且不需使用精密、價格昂貴的參考透鏡,採用偏振技術設計移相干涉法來提升量測數據的準確性;在波前還原的過程中,本文使用澤爾尼克多項式(Zernike Polynomial)進行波前擬合、重建,取得三階像差係數來進行透鏡光學性質之比對,嘗試評鑑此干涉儀之精準度,配合光學軟體模擬此測量系統,日後期望其檢測數據能夠成為鏡片射出成型過程上參數調整之依據,以期對塑膠精密光學鏡片的測試提供參考。


    As the recent fast development in Optics industries, such as digital cameras and cell-phones with built-in camera, the pursuits for smaller, lighter and thinner products with precision optics have made the applications of plastic lenses the dominant approach for fulfillment of same image qualities under weight reduction condition. Therefore, to design, manufacture, test and optimize plastic lenses in fast, simple and low-cost processes is the prominent factor of research development progress in the industries. Based on the principle of point-diffraction interferometer, no environmental influences due to common optical path and without costly reference lenses, this thesis investigates primarily the tests of standard plano-convex lenses via polarized phase-shifting technique for improving accuracy of test data. For obtaining the third-order aberration coefficients by wave-front reconstruction, we use Zernike polynomials in software simulations and experiments for assurance of accuracy of data. Finally, the results would establish the basis on assessment of process parameters in fabrication of plastic lenses and the inspection references for future tests of plastic lenses.

    摘 要 I ABSTRACT II 誌 謝 III 目 錄 IV 圖 目 錄 VII 表 目 錄 X 符號文字對照表 XI 第一章 簡介 1 1-1 研究背景 1 1-2 研究目的 2 1-3 文獻回顧 3 第二章 理論介紹 10 2-1 基本干涉原理 10 2-2 基本繞射原理 11 2-3 點繞射干涉儀簡介 14 2-4 偏振移相式點繞射干射儀分析 16 2-4-1 偏振式點繞射片 16 2-4-2 移相機制 18 2-5 移相法 19 2-5-1 移相公式與相位修正 19 2-5-2 相位展開 21 2-6 波前理論分析 24 2-6-1 待測波前推導 24 2-6-2 離焦像差推導 25 2-6-3 澤爾尼克多項式 27 2-6-4 相位分佈轉澤爾尼克多項式 30 第三章 量測系統模擬與分析 39 3-1 光學模擬軟體簡介 39 3-2 模擬架構與結果 40 3-3 干涉條紋分析 41 3-3-1 波前還原程式測試 41 3-3-2 分析結果 42 第四章 量測實驗結果 51 4-1 系統規劃 51 4-2 量測結果分析 55 4-2-1 離焦測試 55 4-2-2 重複性測試 57 4-3 模擬與實驗結果比較 58 第五章 討論與未來工作 69 5-1 結果與討論 69 5-2 未來工作 71 參考文獻 74

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