基於Hexa-M構型之六維運動量測裝置主要由一上平板、一下平板以及六支固定長度之雙球桿所構成，上平板上固定有六個球接頭，而下平板上固定有六支線性滑軌，以此六維運動量測裝置作機器之運動及誤差量測時，上平板被安裝於機器之主軸上，下平板被固定於機器工作平台上，當機器驅動主軸相對工作平台運動時，上平板相對下平板也產生相對運動，下平板上線性滑軌上的滑塊被雙球桿帶動產生移動，此移動量由光學尺讀頭讀出，送回至量測電腦，經由軟體計算後可以獲得上平板相對下平板及刀具相對工件之六維運動關係。
將此六維運動量測裝置安裝於工具機上，以之作即時六維位置及指向量測，可實現閉機構鏈工具機。在閉機構鏈工具機加工時，此六維運動量測裝置即時量出刀具相對工件的六維運動關係，並作即時位置回授控制，由於刀具相對工件間之運動關係是直接回授，機器的幾何誤差及熱變形誤差均可被量出並補償消除，使加工結果更為精準。
本研究針對Hexa-M六維運動量測裝置及量測系統，以嚴謹之機構參數校正方法，得出準確之機構參數，提升六維運動量測裝置之精度，並以之實現閉機構鏈工具機，進行定位誤差量測及實機切削測試，結果顯示，閉機構鏈工具機可幾乎完全補償消除主軸熱誤差。

Six-Degree Motion Measurement Device based on Hexa-M Parallel Mechanism (Hexa-M MMD) is composed of a top plate, a base and six fixed length double ballbars. There are six ball joints fixed on the top plate and the six linear guideways fixed on the base. When Hexa-M MMD does machine motion and error measurement, the top plate is fixed on spindle and the base is fixed on working table. When the spindle motions relatively with the working table, the top plate and the base also motion at the same time. Meanwhile, the linear slides of Linear guideways are driven by the motion of double ballbars and the displacement of linear slides can be read by the linear scale. Eventually, six-degree motion relation between the tool and the work piece can be calculated via the measurement system.
Hexa-M MMD is also used as feedback system and it can form a closed chain on machine tool which named as CNC machine tool with closed kinematic chain. The feedback system can obtain position error in real-time, the error can be compensated in control system consequently.
The research presents the exact parameters identification of Hexa-M MMD, improving the accuracy. Also presenting the error measurement and machining with the help of CNC machine tool with closed kinematic chain.

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