本文研究之超音波致動器為選用市面上的壓電蜂鳴片（直徑41 mm，厚度0.2 mm）作為驅動元件，驅動模態採用四點固定螺絲90°- 90°-θ- (180°-θ)之結構，改變θ角度會有不同之驅動性能。θ為45°之結構，其兩個不同方向的驅動能力相近，適合用作線性移動平台之驅動。
本研究透過實驗方式對磨耗與驅動能力之關係作定性的了解，磨耗會影響致動器的驅動能力，尤其是暫態反應；在容許之磨耗範圍內，可用閉迴路控制補償磨耗問題，但控制之精確度會隨磨耗之增加而降低，磨耗程度越大時，控制性能的表現越差。
本研究採用可自我學習控制參數之控制器，稱為適應性模糊滑動控制器，設計步驟為：第一是以模糊控制器為基礎，以滑動平面之觀念來簡化控制器變數，將控制誤差及誤差變化率兩個變數變成單一輸入之模糊控制器，簡化設計。第二以Lyapunov Theory及滑動平面之觀念為基礎推導出調適法則，調整模糊控制器之控制輸出歸屬函數之控制量。經實驗驗證，適應性模糊滑動控制器應用於超音波致動器平台之控制時，定位控制之精確度可達1μm，追蹤控制時之誤差可控制在25μm之內；磨耗1.5 mm時，定位控制之精確度約為2.5μm，追蹤控制時之誤差約控制在40μm之內。顯示出適應性模糊滑動控制器，可補償磨耗及負載變化的影響，適用於超音波致動器平台之控制。
另外在驅動電路設計方面，工作電源簡化成單一電源，大幅簡化原驅動電路需三組電源之設計，並可增進致動器驅動的整體表現。

The proposed disc-type ultrasonic actuator is made of a piezo buzzer element (diameter is 41 mm, thickness is 0.2 mm). It can be made as “4 bolts -θ-structure mode” actuator by fixing four bolts arranged in “90°- 90°-θ- (180°-θ)”along the border of actuator. The driving performance of different structure mode actuators will be different corresponding to angleθ. The angle 45° structure mode actuator whose driving abilities in both directions are getting close significantly is very suitable to be used as linear stage’s actuator.
This research also investigates the relationship between wear and driving ability through experiments. The driving ability of ultrasonic actuator will be affected by wear, especially on the transient response. The wearing influence can be compensated by closed-loop controller, but the more wear the more accuracy reducing.
An adaptive fuzzy sliding mode controller is designed for ultrasonic actuator stage through the following two steps: first, derive a new variable (sliding surface) instead of two variables ( & ) to simply fuzzy system; then, develop an adaptive law based on Lyapunove theory to adjust the control parameters corresponding to membership functions of output part. Applying this adaptive fuzzy sliding mode controller to actuator stage, the accuracy can reach 1μm for position control, errors can be limited within 25μm for tracking. While wear reaches 1.5 mm, the accuracy will be about 2.5μm for position control, errors will be limited within 40μm for tracking. The results of experiments show that adaptive fuzzy sliding mode controller is able to compensate the effects caused by both wear and varying load, and suitable for ultrasonic actuator stage.
Another way, this study makes difference on driving circuit by designing one-power-driving instead of three-power-driving. This will improve whole driving performance as well.

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