本論文中，我們將提出一個能有效耦合光纖與單模脊形矽波導的光學耦合器，首先除了設計一個垂直方向的多層錐形波導結構(Tapered Waveguide)來增加模態耦合的效果之外，在材料部分將分別利用聚合物材料(Polymer)與矽材料(Si)來製作兩階段共三層的錐形波導耦合器，使其達到降低成本、提升製程良率與增加耦合效率的目的。
因為錐形波導的水平方向結構變化，將使輸入光訊號產生水平方向的縮減，且在結構縮減的過程中，同時造成垂直方向等效折射係數的變化，造成光訊號產生垂直方向的縮減並使其耦合至等效折射係數較高的區域中傳遞，接著輸出單模脊形矽波導。在材料部分，利用SOI wafer來製作元件，導光層為折射係數較高的矽、下層包覆層為折射係數較低的二氧化矽(SiO2)，上層覆蓋層為空氣(Air)，因為導光層於周圍的包覆層的折射係數差異大，所以製作出的導光元件將會對光擁有很好的侷限能力，且在輸入端的結構只要設計成一個尺寸與光纖差不多大小的結構，就可以將輸入損耗(insertion loss)降至非常低。而本論文將先分別模擬與分析在SOI Wafer上兩段不同材料的錐形波導耦合器之耦合效率，接著透過實際製程並且描述與紀錄製程步驟與實際上遇到的製程問題，最後再對量測的結果做討論。

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