研究生: |
顏士哲 Yen, Shih-Che |
---|---|
論文名稱: |
利用快速熱熔磊晶法製備鍺錫合金結構於矽基板上 Fabrication of GeSn Structures on Silicon Substrate by Rapid-Melt-Growth |
指導教授: |
李明昌
Lee, Ming-Chang |
口試委員: |
吳孟奇
謝光前 |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies |
論文出版年: | 2015 |
畢業學年度: | 103 |
語文別: | 中文 |
論文頁數: | 77 |
中文關鍵詞: | 鍺錫合金 、快速熱熔磊晶法 |
相關次數: | 點閱:2 下載:0 |
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四族材料近年被熱烈討論及研究,因為其能被有效運用在電子及光電元件上面,且這種材料具有最大的優勢為可以有效方便的整合在矽基板上,這對IC產業之後的發展是非常關鍵的。然而四族材料中Ge是非直接能隙的材料,使得這種材料的發光效率非常低,因此我們必須研究Ge的能帶工程,其中一種方法為鍺錫合金,藉由Sn的加入改變Ge的能帶結構,其直接能隙會下降的比非直接能隙快,理論計算約10%的鍺錫合金能變為直接能隙材料。但是錫在鍺內的固體溶度低於1%且由於錫低熔點的特性在高溫下容易有析出的現象,所以高濃度鍺錫合金通常需要低溫非平衡性的分子束磊晶(MBE)法,但是仍然無法避免產生較多缺陷。
我們試著以快速熱熔再磊晶(RMG)的方法來製作高濃度且單晶的鍺錫合金,並針對此製程作材料上的分析,包括後續高溫退火的限制及其析出的情形。但是由於高濃度鍺錫合金的範圍分佈非常集中,我們藉由特殊結構化的設計,在一般直線型的RMG條狀加上光柵的結構,使其在磊晶的過程中有些許鍺錫合金被保留在光柵結構內,進而大幅提升其高濃度鍺錫合金能發光的區域,最後利用PL量測其發光結果。
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