本研究以氣相沉積系統來製備金屬硫化物材料之多種奈米結構，其中包含硫化鎘奈米粒子、奈米線陣列、三元Cd1-xZnxS奈米線陣列、同軸核殼硫化鎘/氧化鎘及硫化鋅/氧化鋅奈米棒陣列等。同時研究與探討這些材料於奈米尺度、特殊結構與複合組成下所展現之相關性質。藉由適當控制反應溫度，導入單源先驅物(single-source precursors)於有機金屬氣相沉積系統(metal organic chemical vapor deposition, MOCVD)中並在無觸媒的情況下，成功地製備出具有不同表觀比(aspect ratio)之硫化鎘奈米線陣列，較大表觀比之硫化鎘奈米線陣列具有較佳的場發射效應。藉由同時導入兩種具反應性差異單源先驅物於有機金屬氣相沉積系統中並控制其反應溫度，成功地製備出不同組成之三元Cd1-xZnxS奈米線陣列，並探討不同組成對其場發射效應之影響。結果顯示，相對於三元Cd1-xZnxS奈米線陣列，二元硫化鎘奈米線陣列由於其具有較好的導電性，因此其具有較佳的場發射效應。除了應用於場發射以外，硫化鎘奈米線陣列亦將其應用於生物胺基酸分子檢測方面，硫化鎘奈米線和酪氨酸(tyrosine)與絲氨酸(serine)在pH 11的情況下產生反應，使得硫化鎘奈米線表現出不同的螢光特性，而可將酪氨酸與絲氨酸予以分辨。此外，本研究亦結合硫化鎘的半導體與壓電特性，第一次將硫化鎘奈米線應用於奈米壓電發電機(piezoelectric nanogenerators)上，藉由原子力顯微鏡之針尖使硫化鎘奈米線彎曲而變形，將其機械能成功的轉換成電能。再者，結合硫化鎘的半導體、壓電與光電特性，探討白光激發對硫化鎘奈米線壓電發電機電壓輸出之影響。此結果顯示，所製備之硫化鎘奈米線於光壓電元件上具有相當大的潛力。另一方面，藉由選擇適當單一單源先驅物，於有機金屬氣相沉積系統中並在無觸媒的情況下，成功地於單一步驟與單一單源先驅物下製備出同軸核殼硫化鎘/氧化鎘及硫化鋅/氧化鋅奈米棒陣列。

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