研究生: |
林源祐 Yuan-Yu Lin |
---|---|
論文名稱: |
有機共軛高分子發光二極體與SU-8波導整合之積體光學元件研究 Integration of PLED and SU-8 waveguide toward OEIC |
指導教授: |
洪勝富
Sheng-Fu Horng 孟心飛 Hsin-Fei Meng |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
論文出版年: | 2005 |
畢業學年度: | 93 |
語文別: | 中文 |
論文頁數: | 61 |
中文關鍵詞: | 有機發光二極體 、光波導 |
外文關鍵詞: | PLED, SU-8, waveguide |
相關次數: | 點閱:1 下載:0 |
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有機共軛高分子發光二極體被認為是下一世代的新興顯示技術,然而在發展上應該有多元的應用,因此本論文的目的是,希望於矽基板上將有機發光二極體與光波導整合,製作成積體光學元件能將電光轉換,未來可以應用於晶片間的資料傳輸。
本論文利用有機共軛高分子發光二極體做為發光源,波導材料則是微機電常見的SU-8厚膜光阻,由於發光二極體正面的發光強度最大,所以只能採用堆疊的方式將發光二極體做在波導的上方,因為二極體所發出的光需要轉九十度的方向才能夠進入波導中,因此我們嘗試以不同方法做測試,希望達到光耦合的要求。
經過許多的失敗經驗,我們找到一種可行的方法克服光耦合的難題,將二氧化矽顆粒摻雜於波導材料中,利用光散射的原理讓光以大角度散射耦合進入波導結構中,有不錯的導光效果,搭配高亮度的發光二極體,我們完成初步的元件結構。此外,我們做了其他的嘗試,例如:切割45度鏡面與光柵電極等方式,不過由於製程難度比較高,良率不佳。於是我們將主要的研究方向偏重在光散射結構的部分。
完成初步的光耦合結構之後,我們可以進行接下來的工作,光調變器的製作以及發光波段的調整,相信經過更多的測試,我們的元件能夠更接近實用化的目標,應用於晶片間的資料傳遞。
Conjugated polymer light-emitting diodes (PLEDs) was considered as the next generation's display technology; Moreover it may find more technological applications. In this thesis, we try to fabricate an OEIC integrating PLED with SU-8 waveguide on silicon substrate. It can be used for chip-to-chip data communication in future.
We utilize PLED as the light source and SU-8 as waveguide. Top emission of PLED has the maximum luminescence intensity. For this reason, we have to make PLED above waveguide and couple light into the waveguide.
After many approaches, we found a workable method by doping SiO2 particles in SU-8 as a diffuser sheet. The incident light reach the diffuser sheet and undergo a large angle scattering. And a fair amount of light is directed into the waveguide. We believe our device structure can be further improved and become pratical in future.
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