當物體尺寸縮小到微米尺度的時候，因為尺度效應的關係，有一些物理特性可以被應用到生物技術上。因此在本論文研究中提出了兩個全新的概念，一個是利用自然蒸發力和結構設計來完成粒子分離，另一個是利用多孔性二氧化矽薄膜製作微流道。在本論文中利用微流體在微米尺度穩定的層流特性，來達到粒子分離的效果。首先利用植物蒸發驅動液體的原理製作類似植物氣孔的蒸發區，使其在微流體系統尾端作為自發性驅動的來源，接著從入口端注入含微粒子液體和不含粒子的流體到微流道中，因為液體處在層流的狀態，所以它不會擴散到不含粒子的流體中，當粒子進入分支結構的時候，不同大小的粒子會隨通過粒子中心的流線進入不同的分支流道，而達到粒子分離的效果。另外在本論文中還發展了一個全新的流道製程，利用厚膜光阻來取代PSG當作犧牲層，以電子束蒸鍍的二氧化矽薄膜當作主要結構，利用多孔性薄膜可以大大減少製程所需的時間，並且容易和金屬製程作整合。此外二氧化矽還兼具化學惰性、親水性、高透光率和價格低廉的優點，將這個製程應用在微流體系統中，在未來的商業上會是個非常有競爭力的技術。

When the size of object is shuck down to micro scale, some physical characteristics can be applied to biotechnology because of scale effects. This thesis has put forward two brand-new conceptions, one utilizes evaporating force and structural design to separate particles naturally, another one use the porous silicon dioxide membrane to fabricate microchannel. In this thesis, we use laminar flow characteristics of microfluid to separate particles. The principle to drive liquid in microfluidic system is evaporating-conception from plants. The evaporating region similar to vents of plants was designed at the end of microchannel to drive liquid spontaneously. The flows with and without particles, were injected into fluidic system, and particles in the flow were fixed on each layer of laminar flow. The particles, flow into separating region, will move with streamline cross theirs center to different branches. Thus, different size of particles will separate spontaneously. Furthermore, a novel fabrication process of microchannel has been developed in this thesis. The material of sacrificing layer of microchannel has replaced by photoresistance. It uses the silicon dioxide membrane, was deposited by E-gun vapor, as main structure of microchannel. This fabrication process only need a short period, and integrates with other fabrication process easily. The silicon dioxide also has other benefits like chemical inertia, hydrophilic, optically clean, and cheap. Therefore, it is a high economic technology to be applied on commercial products.

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