本研究提出創新的製程設計來實現微型高分子滾珠軸承，包括線性軸承滑軌、出平面轉動式軸承及同平面轉動式軸承。線性軸承滑軌及出平面轉動式軸承包括了一組以非等向性濕蝕刻形成矽基材<111>面的V型軌道，以及置入高分子滾珠的空間；其元件包含了移動滑塊、軌道以及置入高分子滾珠的空間皆由感應耦合式電漿蝕刻及濕蝕刻在雙面的<100>晶圓定義出來，最後以磁鐵鑲黏在滑塊上利用磁力致動的方式運動；而同平面轉動式軸承則是以材料替換的概念得到轉子的結構，以及等向性濕蝕刻蝕刻出置入滾珠的空間；高分子滾珠製成的方式則是利用在相同密度的溶液內，以點膠的方式在軌道內置入高分子液珠，高分子液珠照射UV光後在轉子、定子之間固化成滾珠，並且完成微型軸承；最後初步證實其轉動的可行性。

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