近幾年N型基板慢慢取代了傳統的P型基板，也出現了許多新的結構，取代了舊有的主流結構，而又以市面上最為主流的架構TOPCon為最多使用，在各層中不同參數的改變，會出現不同的差異。而本篇論文為製作TOPCon太陽能電池。我們會以利用烤箱跟爐管做氧化鋁退火達成鈍化效果比較以及改變氮化矽層厚度，也會和非TOPCon架構的片子進行比較，來驗證我們的結構可以有效提升太陽能電池效率。氮化矽這層為抗反射塗層、表面鈍化、保護層功用，氧化鋁鈍化層提供鈍化效果，最終將效率等太陽能電池參數提升為目的，又可以延續本實驗室目標，以降低時間金錢成本為重要，在量產上也有優勢。
此實驗一開始我們使用N型矽基板(N-type)裸片來製作。經過沉積tunnel oxide、poly- Si、Al2O3、再經過退火、離子佈植等製程，會先比較製作氧化鋁退火不同儀器下的表現，再以表現較佳儀器製作接續探討太陽能電池背面的氮化矽(SiNx)，使用PECVD沉積不同厚度的SiNx。我們會比較後厚度對於參數影響。在後續製成元件後，使用EDS、TEM量測來看各層成分的組成以及結構，各種儀器量測各項所需參數。我們使用最佳製程為使用爐管氧化鋁退火，沉積SiNx:100nm。得出的TOPCon太陽能電池，其最佳填充因子為59.7%、轉換效率為15.163%。

In recent years, N-type substrates have gradually replaced traditional P-type substrates, leading to the emergence of various new structures, with TOPCon being the most widely used structure in the industry. Different parameters in each layer can result in varying performance, and this paper focuses on the fabrication of TOPCon solar cells. Our goal is to enhance solar cell parameters such as efficiency by utilizing an oven and furnace tubes for aluminum oxide annealing to achieve passivation, by adjusting the thickness of the silicon nitride (SiNx) layer. This layer serves as an anti-reflective coating, surface passivation, and protective layer, and aligns with our lab's objective to minimize time and cost, which is beneficial for mass production.

The experiment begins by using bare N-type silicon wafers. Through processes such as the deposition of tunnel oxide, poly-Si, Al2O3, followed by annealing, ion implantation, and other steps, we first compare the performance of aluminum oxide annealing using different equipment. After determining the best-performing equipment, we proceed to study the effect of varying the thickness of the rear SiNx layer, which is deposited using PECVD. We will compare how thickness influences various parameters. After fabricating the final device, we use EDS and TEM to measure the composition and structure of each layer. The best result was achieved using furnace tube annealing for Al2O3 and 100nm SiNx deposition. The TOPCon solar cell produced had a fill factor of 59.7% and a conversion efficiency of 15.163%.

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