研究生: |
林昆翰 Qwan-Han Lin |
---|---|
論文名稱: |
多產品批間控制之穩定性與性能分析 Stability and Performance Analysis of Mixed Product Run-To-Run Control |
指導教授: |
鄭西顯
Shi-Shang Jang |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 化學工程學系 Department of Chemical Engineering |
論文出版年: | 2005 |
畢業學年度: | 93 |
語文別: | 中文 |
論文頁數: | 80 |
中文關鍵詞: | 批間控制 、多產品製程 、以機台為基礎的控制 、以產品為基礎的控制 |
外文關鍵詞: | run-to-run control, high-mix process, tool-based control, product-based control |
相關次數: | 點閱:2 下載:0 |
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批間控制(run-to-run control,RtR control)現今已被廣泛使用於半導體產業,來降低製程的誤差,以達到最佳控制結果。大部分有關於批間控制方面的研究,都是針對單一機台上的單一種產品而言;然而在實際的工廠操作下,都是在單一機台上運行多種不同的產品。本篇論文將這種「少量多樣」的製程,稱為high-mix製程。本篇論文對上述產品生產情形,歸納出兩種不同的控制策略:
1.每一批次生產的不同產品,可以經由EWMA(Exponent Weight Moving Average)控制器估算出製程干擾。此種控制方法,稱為「以機台為基礎的控制」(tool-based control)。
2.分別考慮同一機台的不同產品,不同的產品有個別的控制器控制。此種控制方法,稱為「以產品為基礎的控制」(product-based control)
本篇論文主要利用單一機台上兩個個別的產品製程,對兩種不同的控制策略進行數學上的理論推導及模擬控制結果。由最終的控制結果顯示,倘若使用tool-based control,在機台有非穩態(non-stationary)干擾及製程和產品模式彼此不協調時,其控制結果會發散。而使用product-based control,其控制結果不會發散,但是當機台有相當顯著的飄移時,控制結果較單一產品的控制為差。
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