微機電系統中，靜電式致動器具有製造過程簡單、材料選擇性高和可靠度高等優點，因此靜電式致動器算是最為廣泛使用的微致動器之一。理論上平板式靜電致動器的最大行進距離只能為初始間距的三分之一，使得應用範圍遭受限制。為了有效提升靜電致動器的行進距離，梳狀式靜電致動器乃應運而生。然而，因為製程上的誤差造成當梳狀式靜電致動器的行進距離超過臨界位移後，靜電致動器將進入不穩定狀態，因而無法繼續行進，此種現象稱為靜電吸附(pull-in)。因此梳狀式靜電致動器的最大行進距離還是有一定的極限。
本研究利用二組梳狀式靜電致動器串聯成電極形式，以期延後靜電吸附的發生，而達到較大位移的效果。由於此種梳狀式靜電致動器需要以順序的方式驅動，因此切換控制器扮演重要的角色。在取得較大的行進距離後，同時期望改善串聯電極梳狀式靜電致動器的暫態響應與穩態響應，因此本研究將PID控制器與切換控制器整合在一起。此外，為了產生回授訊號供控制器使用，本文設計電容感測電路與電容感測器，以便將電容變化轉換成電壓訊號後，透過類比/數位轉換傳送給控制器，完成訊號回授控制。

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