可低溫共燒之玻璃-陶瓷/氧化鋁積層結構的自我束縛燒結行為

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研究生：	廖建閎 Chien-Hung Liao
論文名稱：	可低溫共燒之玻璃-陶瓷/氧化鋁積層結構的自我束縛燒結行為 Self-constrained sintering of a multilayer low-temperature-cofired glass-ceramics/alumina laminate
指導教授：	簡朝和 Jau-Ho Jean
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2007
畢業學年度：	95
語文別：	中文
論文頁數：	16
中文關鍵詞：	低溫共燒陶瓷、翹曲、應力、束縛燒結
外文關鍵詞：	low-temperature-cofired ceramics(LTCC), camber, stress, constrained sintering
相關次數：	點閱：3 下載：0
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本研究中已經成功研發出由CaO-B2O3-SiO2玻璃(CBSG)和Al2O3組成的自我束縛低溫共燒陶瓷系統。實驗方法是製作由CBSG和Al2O3組成的CBSG/Al2O3積層結構，改變的參數分別為束縛層Al2O3層的厚度和Al2O3粒徑。因為CBSG的燒結緻密溫度遠低於Al2O3，所以束縛在CBSG表面不緻密的Al2O3在共燒時可以有效阻止CBSG在X-Y方向的收縮，待CBSG燒結緻密後，CBSG會藉由毛細作用從Al2O3孔隙滲透進入Al2O3層，並與Al2O3反應促使Al2O3層變緻密。此種交互束縛的行為可使CBSG/Al2O3系統在共燒的過程中，只有Z方向產生收縮，X-Y方向幾乎沒有收縮，表現出此自我束縛低溫共燒陶瓷系統緻密的獨特性。

一、簡介………………………………………………………………1
二、實驗方法…………………………………………………………3
    2.1 原始材料……………………………………………………3
    2.2 漿料製備……………………………………………………3
    2.3 刮刀製程……………………………………………………3
    2.4 疊壓…………………………………………………………4
    2.5 脫脂除碳……………………………………………………4
    2.6 燒結…………………………………………………………4
        2.6.1 等溫燒結……………………………………………4
        2.6.2 非等溫燒結…………………………………………4
    2.7 性質分析……………………………………………………5
        2.7.1 燒結收縮量測………………………………………5
        2.7.2 顯微結構觀察………………………………………5
        2.7.3 X光繞射分析………………………………………5
        2.7.4 氧化鋁平均孔隙大小量測…………………………6
三、結果與討論………………………………………………………7
    3.1自由燒結與自我束縛燒結…………………………………7
    3.2束縛層厚度對自我束縛燒結的影響………………………7
    3.3界面反應層的動力學機制…………………………………8
    3.4束縛層粉末粒徑對自我束縛燒結的影響…………………11
四、結論………………………………………………………………13
五、參考文獻…………………………………………………………14

                                

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[2] K. R. Mikeska and D. T. Schaefer, “Method for Reducing Shrinkage during Firing of Ceramic Bodies,” U.S. Pat. No. 5,254,191, 1993.

[3] B. Geller, B. Thaler, A. Fathy, M. J. Liberatore, H. D. Chen, G. Ayers, V. Pendrick, and Y. Narayan, “LTCC-M: An Enabling Technology for High Performance Multilayer RF Systems,” J. Microwave, 7, 64-72 (1999).

[4] J. Bang and G. Q. Lu, “Constrained-Film Sintering of a Borosilicate Glass: In Situ Measurement of Film Stresses,” J. Am. Ceram. Soc., 78 [3] 813-15 (1995).

[5] T. J. Garino and H. K. Bowen, “Deposition and Sintering of Particle Films on a Rigid Substrate,” J. Am. Ceram. Soc., 70 [11] C315-17 (1987).

[6] T. J. Garino and H. K. Bowen, “Kinetics of Constrained-Film Sintering,” J. Am. Ceram. Soc., 73 [2] 251-57 (1990).

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[8] Y. C. Lin and J. H. Jean, “Constrained Sintering of Silver Circuit Paste,” J. Am. Ceram. Soc., 87 [2] 187-91 (2004).

[9] R. K. Bordia and R. Raj, “Sintering Behavior of Ceramic Films Constrained by a Rigid Substrate,” J. Am. Ceram. Soc., 68 [6] 287-92 (1985).

[10] S.Y. Tzeng and J. H. Jean, “Stress Development during Constrained Sinetring of Alumina/Glass/Alumina Sandwich Structure,” J. Am. Ceram. Soc., 85 [2] 335-40 (2002).

[11] Y. C. Lin and J. H. Jean, “Constrained Densification Kinetics of Alumina/Borosilicate Glass + Alumina/Alumina Sandwich Structure,” J. Am. Ceram. Soc., 85 [1] 150-54 (2002).

[12] J. C. Chang and J. H. Jean, “Self-Constrained Sintering of Mixed Low-Temperature-Cofired Ceramic Laminates,” J. Am. Ceram. Soc., 89 [3] 829-35 (2006).

[13] C. D. Lei and J. H. Jean, “Effect of Crystallization on the Stress Required for Constrained Sintering of CaO-B2O3-SiO2 Glass-Ceramics,” J. Am. Ceram. Soc., 88 [3] 599-603 (2005).

[14] C. R. Chang and J. H. Jean, “Crystallizatin Kinetics and Mechanism of Low-Dielectric, Low-Temperature, Cofirable Cao-B2O3-SiO2 Glass-Ceramics,” J. Am. Ceram. Soc., 82 [7] 1725-32 (1999).

[15] S. Pejovnik, D. Kolar, W. J. Huppmann, and G. Petzow, “Sintering of Alumina in Presence of Liquid Phase”; pp. 285-92 in Sintering-New Developments. Edited by M. M. Ristic. Elsevier, Amsterdam, The Netherlands, 1978.

[16] J. H. Jean and T. K. Gupta, “Liquid-Phase Sintering in the Glass-Cordierite System,” J. Mater. Sci., 27 [6] 1575-84 (1992).

[17] R. R. Tummala and B. J. Foster, “Wetting of Glass-to-Metal and Glass-to-Ceramic in Water-Vapour Atmospheres,” J. Mater. Sci. Lett., 10 [5] 905-06 (1975).

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