發展傾轉載台應用於桌上型掃描穿透式電子顯微鏡

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研究生：	凃建安 Tu, Chien-An
論文名稱：	發展傾轉載台應用於桌上型掃描穿透式電子顯微鏡 Development of Tilting Sample Holder Applied for Desktop Scanning Transmission Electron Microscope
指導教授：	陳福榮 Chen, Fu-Rong 歐陽汎怡 OuYang, Fan-Yi
口試委員:	吳文偉 Wu, Wen-Wei 蘇紘儀 Su, Hong-Yi
學位類別：	碩士 Master
系所名稱：	原子科學院 - 工程與系統科學系 Department of Engineering and System Science
論文出版年：	2019
畢業學年度：	107
語文別：	中文
論文頁數：	71
中文關鍵詞：	桌上型電子顯微鏡、傾轉載台、掃描穿透式電子顯微鏡
外文關鍵詞：	Desktop Electron Microscope, Scanning Transmission Electron Microscope, Tilting Sample Stage
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與其他儀器發展的過程類似，電子光學系統也正朝向微型化的趨勢發展。桌上型的電子光學系統也在近五十年間陸續的商業化。目前的商業化桌上型電鏡，大多數仍以掃描式電鏡(SEM)為主，而本實驗室目前設計出的六硼化鑭電子槍掃描穿透式桌上型電鏡(STEM)，可以收集穿透電子訊號，對薄樣品而言，STEM影像的對比度會比SEM影像好上很多，觀測低原子序樣品的能力也較強，也因此使桌上型電鏡的發展更進一步。
本研究分為兩階段，由於穿透電子訊號強度與樣品原子序大小相關，因此第一階段我藉由拍攝200nm SiO2奈米顆粒樣品，找出基於目前桌上型電子顯微鏡的解析能力，樣品試片能夠取得高角度環形暗場影像的最佳載台高度、樣品到偵測器之間工作距離等環境參數。第二階段則是發展桌上型掃描穿透式電子顯微鏡的載台傾轉功能，由於自行設計的傾轉載台，需要在狹小的真空腔體中使用且硬體間不能發生干涉，因此載台需要設計得體積小且同時方便操作，並使用模擬軟體來模擬載台在不同自然頻率下的震動模態，藉此找出降低震動的材料與設計，同時能提升影像品質，最終我們成功設計降低震動影響的傾轉載台，並收集到不同角度下的穿透散射電子訊號，也以傾轉載台拍攝出不同角度的影像，並且應用於桌上型電子顯微鏡的EDS訊號收集上，我們發現在目前的機體架構下，傾轉角度30°時會有最佳的EDS訊號偵測效率。

The desktop Electron Microscopes (desktop EMs) have been commercialized in the recent years. Current commercial desktop EMs are mainly based on scanning electron microscope (SEM) mode, which limits the ability to observe various kinds of samples on desktop EMs. To broaden the capability of desktop EMs, a homemade desktop scanning transmission electron microscope (desktop STEM) is designed, which collects signals of both backscattered electrons and transmission scattering electrons. The contrast of desktop STEM images is much better than the contrast of desktop SEM images for low atomic number (low Z) samples.
The research is divided into two steps. In the first step we try to record high angle annular dark field (HAADF) images by recording images of low Z nanoparticle samples because the contrast of HAADF images is related to Z. In the second step we develop a tilting sample holder for desktop STEM. Since the vibration influence on the tilting sample holder is relatively larger than that on the original sample holder, we deal with the vibration problem by simulating Eigen frequency of the sample holder and improving the mechanical design of it. Finally we successfully record tilting images with implicit vibration influence.

摘要    II
ABSTRACT    III
誌謝    IV
總目錄    V
圖目錄    VIII
表目錄    XI
第一章 緒論    1
1. 前言    1
1. 1. 電子顯微鏡簡介    1
1. 2. 桌上型電子顯微鏡簡介    5
2. 桌上型電子顯微鏡    7
2. 1. 桌上型電鏡與傳統電鏡比較    7
2. 2. 桌上型電子顯微鏡發展    8
3. 研究動機    8
第二章    理論與文獻回顧    9
1. 掃描穿透式電鏡成像原理    9
1. 1. 電子散射    9
1. 2. 高角度環形暗場像    11
2. 可調式偵測器    17
3. 桌上型掃描穿透式電鏡    20
4. 掃描穿透式電鏡(STEM)傾轉影像之應用    23
4. 1. 3D重構(3D Reconstruction)應用    23
5. 有限元素分析法模擬機械震動    25
5. 1. 材料與機械震動之關係    29
5. 2. 機械結構與震動之關係    30
第三章    實驗設計    34
1. 儀器設計    34
1. 1. 實驗載體—商業桌上型電子顯微鏡    34
1. 2. 更換式樣品載台設計    36
1. 3. 傾轉載台設計    39
1. 4. 步進馬達    40
2. 載台頻率模態分析    42
2. 1. 更換式樣品載台模擬    42
2. 2. 傾轉樣品載台模擬    43
3. 實驗架設    46
3. 1. 樣品材料    46
3. 2. 更換式樣品載台測試    46
3. 3. 傾轉樣品載台測試    47
第四章    結果與討論    48
1. 六硼化鑭電子槍桌上型掃描穿透電鏡系統    48
2 STEM影像拍攝    51
3. 傾轉STEM影像拍攝    57
4. 傾轉載台震動測試    59
5. 傾轉載台EDS-STEM測試    63
第五章    結論    67
參考文獻    69


                                

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