本研究將利用微機電製程技術製作一微光學聚焦元件，藉由將此元件整合於微型鏡頭模組中，改變光學系統的特性以達到自動對焦的功能。同時可降低鏡頭的尺寸以及耗電量，並使得製造成本進一步的減低。元件將以以磁力作為驅動力來源，並藉由單晶矽的材料特性將可使得元件不受材料疲勞破壞影響導致壽命減少。其光學品質與現今的音圈馬達產品相比亦較穩定，且零件數量較少、易於組裝的特性在未來生產時亦能減低製造成本。本研究內容包含元件剛性設計、驅動力設計以及製程規畫並實現。最後待原件完成，另擬定一測量方案以驗證此元件實際應用於微型鏡頭模組的可行性。

In this study, we will make micro actor devices by MEMS technology. By assembling these devices into miniature camera module, it can provide focusing ability and even zooming ability. These MEMS devices could make AF camera smaller and higher efficiency. Besides, these devices could decrease the cost by batching manufacture and using fewer parts. Devices are driven by magnetic force. Springs in the device are made by single crystal silicon, which avoid the damage by fatigue of materials, so the life time of device will be longer than other metal device, and the optical quality is better than other VCM actuator also. Compared with VCM actuator, the device in this study is less components quantity and easy to assemble. This study will design the device structure and driving source. It also realizes the devices by different fabrication process. After that, devices will be tested by different experiment to get the performance and the possibility of assembling the device into miniature auto focusing camera module.

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