本論文研發六維運動量測系統，將六維運動量測裝置(MMD)應用於多軸工具機之誤差量測，設計出量測程序，以量測工具機各線性軸及轉動軸定位時之軸線及定位誤差，及多軸同動驅動時之動態軌跡誤差，並針對六維運動量測裝置之量測空間限制，提出全行程量測方法。本量測系統由工具機各軸定位之量測值擬合出各軸之實際軸線，建立理想機器軸參考座標系，並建立MMD與工具機各驅動軸間的座標轉換關係，接著依工具機各驅動軸間的公稱設計尺寸，計算出工具機所有之幾何誤差項，對於三軸工具機而言，包括3項線性軸間之垂直度誤差與各線性運動軸之6項定位誤差，共21項幾何誤差；對於五軸工具機而言，包括3項線性軸間之垂直度誤差、8項旋轉軸間之組裝誤差、5項主軸之組裝誤差，及各運動軸之6項定位誤差，共46項幾何誤差。論文中提出之量測方法與數據處理程式，以雷射干涉儀量測系統進行驗證，包括單線性軸定位時之線性誤差與角度誤差驗證，及單軸步階驅動之動態響應驗證，比對結果證實此研發量測系統之正確性。本研發之量測系統最大的特色是，能夠在單一參考座標系內量出工具機的各種誤差，包含靜態定位時的幾何誤差與連續循圓運動及非連續轉角運動時之各種動態軌跡誤差。

This thesis presents the development of a six-DOFs motion measurement system (MMS). The motion measurement device (MMD) is applied on multi-axis machine tools for the measurement of errors. The necessary measuring procedures are proposed for the measurement of positioning errors of linear and rotary axes of a machine tool and for the measurement of dynamic contour errors of simultaneously driven axes. Furthermore, a long distance measurement method is proposed to overcome the limitation of the measuring workspace of the MMD. This measurement system can identify the actual axis from the measured data, build the ideal reference coordinate of the machine tool, and construct the coordinate transformation between the MMD coordinate system and the ideal reference coordinate system. By entering the machine tool’s nominal design data, the MMS can identify all geometric errors of the tested machine tool. For three-axis CNC machine tool, this includes three squareness errors between three machine axes and six motion errors of each machine axis, or totally 21 geometric errors. For five-axis CNC machine tool, this includes three squareness errors between three linear axes, six motion errors of each machine axis, eight link errors of the two rotary axes, five assembly errors of the main spindle and six motion errors of each machine axis, or totally 46 geometric errors. The proposed measurement methods and the data processing program are tested and results are compared with these of a laser interferometer measuring system. The experimental items include the evaluation of the linear and rotary errors by positioning of a linear axis, and the dynamic responses of the step inputs. The results prove the correctness of the developed system. The most significant feature of the developed measurement system is that the errors of a CNC machine tool can be measured in one single reference coordinate system, including the geometric errors at static positioning and the dynamic contour errors of a continuous circular motion and of a non-continuous corner motion.

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