本篇論文為首篇在液體環境中使用電容式感測的微機電振盪器，在過去的研究中主要受限於電容式感測結果被直接從驅動電極通過液體的驅動訊號影響，使原本在液體中振動位移已經降低許多的機械結構更不易感測出位移的電訊號，此篇使用調制的方式將機械結構與驅動訊號分離，便能解決此問題。此外，本篇論文也整合了鎖相迴路，藉由鎖相迴路來使機械結構能維持振動，其中維持整個迴路的穩定振盪，是由於機械結構的訊號為二階系統，在最大的位移時會有著與驅動訊號相差-90度的訊號，而鎖相迴路補足這90度的相位差來完成一個振盪迴圈。本論文使用TSMC 2-polysilicon 4-metal 0.35-m CMOS process，並使用Piranha蝕刻金屬、Silox Vapox III蝕刻二氧化矽，兩種等向性溼蝕刻將結構釋放，最後使用活性離子刻蝕將電路所需接點的金屬露出。整顆晶片大小為2.8mm×2.8mm。
本篇論文使用了50 kHz結構，感測出純水、丙酮、異丙醇、乙醇四種液體，在空氣中測出頻率為51.2 kHz的共振器，在以上四種液體中使用鎖相迴路鎖定之頻率分別為78 kHz、121.9 kHz、146 kHz、202 kHz，以及空氣中頻率為46 kHz的共振器，使用鎖相迴路鎖定之頻率分別為85.1 kHz、126.3 kHz、148.3 kHz、211 kHz，其結果證實頻率與液體的雷諾數相關，但為非線性模型，且與共振頻率有相當大的關聯性。

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