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研究生: 李彥儒
論文名稱: 三維晶片整合封裝掉落測試可靠度研究
Reliability Analysis of 3D IC Integration Packaging under Drop Test Condition
指導教授: 江國寧
Chiang, Kuo-Ning
口試委員: 劉德騏
Liu, De-Shin
江國寧
Chiang, Kuo-Ning
蔡宏營
Tsai, Hung-Yin
鄭仙志
Zheng, Xian-Zhi
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 116
中文關鍵詞: 三維晶片整合封裝電路板層級掉落測試
外文關鍵詞: 3D IC integration packaging, board level drop test
相關次數: 點閱:81下載:0
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  • 電子封裝(Electronic Packaging)朝向微型化方向發展,三維晶片整合(3D IC Integration)封裝和傳統封裝相比,除體積較小外,較少訊號延遲(Signal Delay)更是一大突破,近年已逐漸使用在攜帶式電子產品中。攜帶式電子產品因尺寸較小而易於使用過程中掉落,因此須研究其封裝元件掉落可靠度以增加產品壽命。儘管三維晶片整合封裝已發展了許多之製程技術及結構,但其掉落可靠度研究仍有所不足。
    電路板層級掉落測試(Board Level Drop Test)被廣泛採用以評估封裝受掉落衝擊時之可靠度。本研究運用有限單元軟體ANSYS/LS-DYNA 3D進行了電路板層級掉落模擬,並搭配實驗結果以驗證方法之可信賴度。接著利用該模擬方法分析三維晶片整合封裝之動態行為。最終以參數化分析探討封裝尺寸、材料等可能變異對可靠度之影響。掉落測試結果顯示與熱循環測試情況不同,晶片堆疊層數增加會導致封裝銅凸塊掉落可靠度下降。添加底膠可提升錫球之可靠度,但在矽載板過薄之情況下會導致銅凸塊可靠度下降。

    關鍵字:三維晶片整合封裝、電路板層級掉落測試。


    摘要 I Abstract II 誌謝 IV 目錄 V 圖目錄 IX 表目錄 XIV 第一章 緒論 1 1-1 研究動機 1 1-2 文獻回顧 2 1-2-1 三維封裝 3 1-2-2 電子封裝掉落可靠度 6 1-3 研究目標 12 第二章 基礎理論 14 2-1 有限單元法暫態分析時間處理法 14 2-1-1 外顯式時間處理法 15 2-1-2 內隱式時間處理法 18 2-2 質量縮放 20 2-3 零能量模式 21 2-4 錫球外型預估法 24 第三章 電路板層級掉落測試實驗 27 3-1 JEDEC掉落測試規範簡介 27 3-2 掉落測試機台簡介 32 3-2-1 掉落機台系統 32 3-2-2 量測系統 34 3-3 掉落測試實驗結果與討論 38 第四章 掉落測試模擬分析 44 4-1 測試板模態分析 44 4-2 測試板動態分析 48 4-2-1 動態分析方法 48 4-2-2 動態分析驗證與簡化 49 第五章 三維晶片整合封裝掉落模擬 54 5-1 三維晶片整合封裝結構 54 5-2 基礎三維晶片整合封裝模擬結果 58 5-2-1 矽載板與矽晶片之動態行為 58 5-2-2 直通矽晶穿孔之動態行為 59 5-2-3 錫球之動態行為 60 5-2-4 銅凸塊之動態行為 62 5-3 質量縮放 64 5-3-1 錫球動態行為比較 64 5-3-2 銅凸塊動態行為比較 66 5-4 總結 69 第六章 三維晶片整合封裝參數化分析 70 6-1 晶片改變之影響 70 6-1-1 晶片堆疊層數之影響 70 6-1-2 晶片厚度之影響 75 6-1-3 綜合討論 76 6-2 矽載板厚度改變之影響 77 6-3 底膠及壓模膠之影響 78 6-3-1 模型A 80 6-3-2 模型B 87 6-3-3 模型C 90 6-4 矽載板厚度與底膠之交互影響 92 6-5 額外封裝體之影響 95 6-5-1 質量縮放驗證 96 6-5-2 U8結果比對 98 6-5-3 U8U15比對 100 6-6 總結 102 第七章 結論與未來展望 104 參考文獻 107

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