一種以奈米碳管電極材料製作之新穎神經探針

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研究生：	蘇煥傑 Su, Huan-Chieh
論文名稱：	一種以奈米碳管電極材料製作之新穎神經探針 Carbon Nanotubes as an Electrode Material for Novel Neural Probes
指導教授：	游萃蓉 Yew, Tri-Rung
口試委員:
學位類別：	博士 Doctor
系所名稱：	工學院 - 材料科學工程學系 Materials Science and Engineering
論文出版年：	2010
畢業學年度：	98
語文別：	英文
論文頁數：	122
中文關鍵詞：	奈米碳管、神經探針、微波處理、電漿處理、神經訊號紀錄
外文關鍵詞：	Carbon nanotubes, Neural probe, Microwave treatment, Plasma treatment, Neural signals recording
相關次數：	點閱：1 下載：0
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傳統的神經探針已被廣泛應用於研究腦神經的電生理功能，然而目前發展的多種傳統微電極探針，仍無法長期可靠地偵測神經細胞活動，及區域性、選擇性地刺激神經組織，其主要歸因於下列缺點: (1)電極尺寸仍過大，易傷害細胞，(2)目前電極多用金屬材質電極，在低頻區段具高阻抗，(3)長期植入後會引發局部發炎或免疫相關反應。為解決上述問題，本研究將利用奈米碳管(carbon nanotubes)當作探針來取代傳統的神經探針。
本論文主要研究一種新穎的三維錐狀奈米碳管探針(cone-shaped 3D carbon nanotube probe)，以運用於神經訊號之記錄。奈米碳管是利用催化化學氣相沉積法(catalytic thermal chemical vapor deposition)合成於矽尖錐上，此三維結構探針和一般二維探針在同樣投影面積相比下，具有較大的奈米碳管表面積，在神經訊號量測上更具有較高的空間解析度。此外本論文也利用水電漿(H2O plasma)和氧電漿(O2 plasma)處理，來修飾奈米碳管的表面特性。及以微波(microwave)處理，來增進奈米碳管和其基板的附著性。由電化學量測結果顯示，經由氧電漿處理過後的奈米碳管具有較低的介面阻抗(~ 64.5 □□mm-2)和較高的介面電容(~ 2.5 mF cm-2)。本論文更進一步利用經氧電漿處理的奈米碳管探針來偵測螯蝦的神經訊號，結果顯示本研究所研發的經氧電漿處理的奈米碳管探針，具有較佳的量測空間解析度和極佳的電化學特性，對於神經訊號記錄應用具有極大的潛力。

Traditional neural electrodes have been employed widely to investigate the physiological functions of the brain. However, various micro-electrode probes currently developed still cannot reliably detect the activity of the neural cell for a long term, and cannot stimulate the neural tissues regionally and selectively. This is mainly due to that the probe size is still too large, the impedance is too high for metallic electrodes at low frequency region, and the long time implantation will induce tissue inflammation. To resolve above issues, this research is to study carbon nanotubes (CNTs) as an neural electrode material to replace traditional neural electrodes.
A novel cone-shaped 3D carbon nanotube (CNT) probe is proposed as an electrode for the applications in neural recording in this work. The electrode consists of CNTs synthesized on the cone-shaped Si (cs-Si) tip by catalytic thermal chemical vapor deposition (CVD). This probe exhibits a larger CNT surface area with the same footprint area and higher spatial resolution of neural recording compared to planar-type CNT electrodes. An approach of improving the CNT characteristics by H2O or O2 plasma treatment to modify the CNT surface will be also presented. In addition, the effect of microwave (MW) treatment to improve the adhesion of carbon nanotubes (CNTs) to a substrate is examined. According to electrochemical characterization, O2 plasma-treated 3D CNT (OT-CNT) probes revealed low impedance per unit area (~ 64.5 □□mm-2) at 1 kHz and high specific capacitance per unit area (~ 2.5 mF cm-2). Furthermore, the OT-CNT probes were employed to record the neural signals of a crayfish nerve cord. The findings in this work suggest that OT-CNT probes exhibit potential advantages of high spatial resolution and superb electrochemical properties which are suitable for neural recording applications.

摘要    i
Abstract    iii
誌謝    v
Contents    viii
List of Figures    xii
List of Tables    xviii
  Introduction    1
Literature Review    4
1    Conventional Electrodes    4
1.1    Metal Microwire Electrode    5
1.2    Michigan Electrode    5
1.3    Utah Electrode    6
1.4    Summary of Conventational Electrodes    8
2    Basics of CNTs    9
2.1    Geometric Structures of CNTs    9
2.2    Properties of CNTs    12
3    CNT Electrode    14
4    Comparison between Iridium Oxide and CNT Electrode    17
5    Improve the Adhesion of CNTs to A Substrate    19
  Experimental Procedures and Instruments    21
1    Experimental Procedures    21
1.1    Experimental Flow    21
1.2    Substrate Preparation    22
1.3    CNT Growth by Chemical Vapor Deposition    24
1.4    Fabrication of 3D CNT Electrode    26
1.5    Microwave Treatment on CNTs    29
1.6    Surface Treatment on CNTs    30
1.7    Adhesion Test    32
2    Experimental Instruments    33
2.1    Scanning Electron Microscope (SEM)    33
2.2    Transmission Electron Microscopy (TEM) and Energy Dispersion Spectrometer (EDS)    34
2.3    Micro-Raman Spectroscopy (m-Raman)    35
2.4    X-ray Photoelectron Spectroscopy (XPS)    36
2.5    Contact Angle System    37
2.6    Electrochemical Impedance Spectroscopy (EIS) & Cyclic Voltammetry (CV)    37
3    Biocompatibility Tests and Neural Signals Detection    38
3.1    Biocompatibility Tests    38
3.2        Neural Signals Detection    39
  Optimization of Carbon Nanotube Growth    41
1    CNT Growth Using Ni-based Catalyst    41
1.1    The Effect of CNT Synthesis Temperature    41
1.2    The Effect of Ti Thickness    43
1.3    SEM and Raman Spectrum of CNT Growth    44
2    CNT Growth Using Fe-based Catalyst    45
3    Summary    47
  Improving the Adhesion of Carbon Nanotubes Using Microwave Treatment    48
1    Microwave Treatment Process Optimization    49
1.1    The Effect of Microwave Treatment on CNT Adhesion    49
1.2    Graphitization of As-grown CNTs and Microwave-treated CNTs    52
1.3    CNT Adhesion Test by Inserting into Agar Gel    53
2    Electrochemical Properties of As-grown and Microwave-treated CNTs    54
3    Mechanism of CNT Adhesion Improvement Through Microwave Treatment    55
3.1    Transmission Electron Microscopy (TEM) and Energy Dispersion Spectrometer (EDS) Analyses    55
3.2    Model of CNT Adhesion Improvement Through  Microwave Treatment    58
4    Summary    60
  Hydrophilic Enhancement by Plasma Treatment    61
1    CNT Surface Treatment by H2O Plasma    61
1.1    CNT Surface Morphology after H2O Plasma Treatment    61
1.2    CNT Surface Wettability after H2O Plasma Treatment    63
1.3    Long-term Stability of Hydrophilic CNTs Treated by H2O Plasma    64
1.4    Graphitization of As-grown CNTs and H2O Plasma-treated CNTs    65
1.5    Electrochemical Properties of As-grown CNTs and H2O Plasma-treated CNTs    67
1.6    XPS Analyses of H2O Plasma-treated CNTs    68
1.7    Quantify the Degree of Hydrophilicity for CNTs Based on Interface Impedance    69
1.8    Amorphous Carbon Removed by H2O Plasma Treatment    71
2    CNT Surface Treatment by O2 Plasma    74
2.1    Comparison between O2 Plasma Treatment and H2O Plasma Treatment    74
2.2    XPS Analyses of O2 Plasma-treated CNTs    76
3    Summary    77
  A Cone-shaped 3D Carbon Nanotube Probe for Neural Recording    78
1    Physical Characterization of 3D CNT Probes    78
1.1    SEM Images of 3D CNT Probes    78
1.2    HRTEM Images of 3D CNT Probes    80
1.3    XPS Analyses of 3D CNT Probes    81
2    Electrochemical Characterization of 3D CNT Probes    84
3    Neural Signal Recording of 3D CNT Probes    89
4    Comparison between 3D CNT Probe and Other CNT Electrodes    93
5    Biocompatibility of CNT Probes    95
6    Summary    98
  Conclusion    99
  Future Prospects    102
Reference    107
Curriculum Vitae    119
List of Publications    120

                                

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Chapter 3
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Chapter 4
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Chapter 7
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Chapter 9
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