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研究生： 蕭伊淵
論文名稱： 在不同條件下硒化銅銦硒(CuInSe2)薄膜之影響
The influence of selenization conditions on CuInSe2 thin film
指導教授： 吳孟奇
Wu, Meng-Chyi
朱治偉
Chu, Chih-Wei
口試委員: 何充隆
陳方中
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年： 2012
畢業學年度： 100
語文別： 英文
論文頁數： 62
中文關鍵詞： 太陽能電池 、薄膜 、銅銦硒
外文關鍵詞： chalcopyrite
相關次數： 點閱：1  下載：0 
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    • 在這篇論文中將會探討，銅銦硒薄膜利用爐管兩段式加熱，會因第一段的溫度使得硒粉末蒸發速率不同，當溫度恰好過其沸點蒸發速率小於其與銅銦金屬起化學反應的速率，會使得薄膜內硒的組成比增加，第二段固定在攝氏500度，調變退火時間，使得銅銦硒薄膜能夠完成再結晶，並使用Br2/ MeOH蝕刻金屬相，以提高硒的組成比，在背電極鉬以及前驅物之間蒸鍍上硒，以提高薄膜內硒的組成比，使其略微超過50%。並嘗試製作背電極Mo、緩衝層CdS、窗層i-ZnO以及透明導電電極AZO，以製作銅銦硒太陽能電池。

    Abstract（in Chinese）……………………………………………I Abstract（in English）……………………………………………II Thanks（in Chinese）…………………………………………III Contents…………………………………………………………IV Chapter 1 Introduction……………………………………1 1-1 Introduction and motivation…………………………………1 Chapter 2 Property of the CIS solar cell………………4 2-1 Introduction of CuInSe2 solar cell…………………………4 2-2 CuInSe2 thin film……………………………………………6 Chapter 3 Experimental detail…………………………8 3-1 Device structure………………………………………………8 3-2 Experimental instrument…………………………………13 3-2-1 Sputter……………………………………………13 3-3 Measurement instrument…………………………………16 3-3-1 The Four-probe electrical measurements………16 3-3-2 The X-ray Diffraction……………………………17 3-3-3 The X-ray Fluorescence (XRF)…………………19 3-3-4 Atomic Force Microscopy (AFM)………………22 3-3-5 The Scanning Electron Microscope……………25 Chapter 4 Results and discussion 26 4-1 DC Power Sputter Molybdenum thin film………………26 4-2 Growth of CdS thin films by chemical bath deposition process………………………………………………………29 4-3 RF Power Sputter AZO thin film analysis………………35 4-4 Selenization CuInSe2 by furnace……………………………38 Summary…………………………………………………………58 Reference…………………………………………………………60

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