本研究結合白光掃描干涉儀(White Light Scanning Interferometer, WLSI)與彩色共焦顯微儀(Chromatic Confocal Microscope, CCM)建構一套多波長共焦干涉儀(Multi-Wavelength Confocal Interferometer, MWCI)，其中利用繞射式光學元件(Diffractive Optical Element, DOE)的軸向色散特性，可以用於表面形貌的即時量測。
本研究架設之MWCI是以Linnik干涉儀之準直光模組為基礎，使用的DOE為焦距300mm、設計波長550nm並搭配20X顯微物鏡，再以單點式光譜儀擷取彩色共焦干涉資訊。本研究比較了DOE理論與實驗上的色散性能差異，並驗證了DOE在設計波長處有最佳繞射效率。本研究亦針對分光鏡及共焦濾波器等光學元件組合以及高通濾波器和峰值判斷法等軟體進行最佳化設計，透過自行編寫的軟體分析並分別比較兩種分光鏡、六種共焦濾波器組合及兩種高通濾波器之干涉訊號和光強差異，得到最佳化系統架構及形貌演算法。
本研究透過垂直掃描反射鏡建構出高度與波長校正曲線，三次重複掃描結果顯示各高度之波長差異皆低於0.5%，證明了所架設之MWCI具備高穩定性與高重現性。另外本研究所架設之MWCI具即時性、高精度且非破壞性等優點，垂直解析度為0.4μm，水平解析度為36.5μm，量測深度為170μm。

In this thesis, a multi-wavelength confocal interferometer (MWCI) was developed by integrating the white light scanning interferometry (WLSI) and chromatic confocal microscopy (CCM). By using the axial dispersion characteristics of the diffractive optical element (DOE), MWCI can be used to determine the real time surface profile.
The MWCI developed in this thesis is based on the collimated light module of Linnik-type interferometer, and the interference signals were captured by a single-point measurement spectrometer. The adopted DOE was designed with a focal length of 300mm and a design wavelength of 550nm. By comparing the difference in dispersion performance between theory and experiment, it was proved that the adopted DOE has the best diffraction efficiency at the design wavelength. Moreover, the optimization of both beam splitter and confocal filter as well as software such as high-pass filter and peak-determination methods were analyzed. Optimum system structure and topographical algorithms were obtained by comparing the interference signals and light intensities of two beamsplitters, six confocal filter combinations and two high-pass filters by using self-developed software.
The height-wavelength calibration curve was obtained by using the vertical scanning reflecting mirror. The wavelength difference of each step height was less than 0.5% in three repeated scans; as a result, it was found that the MWCI adopted in this thesis has high stability. The advantages of the MWCI are real-time, high precision and non-destructive. In addition,

the vertical and horizontal resolutions are respectively 0.4μm and 36.5μm, and the measurement range is 170μm.

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