摘要
本論文主要探討如何增進穿透式電子顯微鏡與電子能量損失譜儀對於奈米材料系統的分析能力，並解決現今穿透電鏡在分析奈米材料系統時所遭遇到的難題。在奈米材料系統中，材料的組成、結構以及特性均會因為量子效應以及表面效應而有所改變，上述三個現象對於發展奈米科技佔有舉足輕重的角色，因為若是無法正確的掌握材料的特性，則無法有效的將材料應用於奈米元件上。因此對於現今的奈米科技而言，當務之急便是要發展在奈米尺度下量測材料性質的工具或技術。然而，大多數的分析工具並無法具有奈米尺度甚至近原子尺寸的空間解析度，故在分析上均是算是統計的結果而並非個別奈米材料的性質。場發射穿透式電子顯微鏡的優點在於能夠快速變換空間解析度，可以由微米尺度到近原子尺度，因此可以分析的範圍非常廣泛，電子能量損失譜儀則是藉由收集入射電子因穿透樣品時與樣品作用產生的能量損失能譜結合理論模擬計算之後可以得到材料的組成及電子組態。而由電子損失能譜結合二維空間分佈技術可以得到元素及濃度的空間分佈，不過卻無法得到材料特性的二維空間分佈，本篇論文使用快速傅立業內插法、最大熵解卷法以及小波轉換去除雜訊法增進能量損失譜儀的能量解析度以及去除能量損失譜中的雜訊，使得經由改良式連續能譜影像法所擷取的能量損失譜具有定性與定量的特性。
穿透式電子顯微鏡在拍攝高分辨影像時容易受外界或是記錄系統本身的雜訊所影響而導致影像品質及解析度下降，這現象對於掃瞄穿透式電鏡暗場影像特別明顯。因此，本篇論文討論在穿透式顯微鏡以及掃瞄穿透式電鏡暗場影像雜訊的特性及行為，並提出以小波轉化去除雜訊的方式最有效率而且可以回復掃瞄穿透式電鏡暗場影像的品質與原子序對比。
最後，結合高分辨電子顯微鏡、電子能量損失譜儀以及光致激發螢光譜儀分析本實驗室所自行合成之不同尺寸的氧化鋅奈米線的性質。藉由致激發螢光譜儀分析不同尺寸的氧化鋅奈米線並結合電子損失能量譜儀分析個別奈米線的能隙證明氧化鋅奈米線的綠光光譜特性主要是由表面效應所主導，此外，配合理論計算（FEFF code）與鋅(Zn) 元素L2,3核損失峰之電子能量損失譜的分析確認氧化鋅奈米線綠光光譜的發光機制主要是由於氧空缺存在於奈米線表面所導致。同時，亦觀察得出當氧化鋅奈米線線徑小於20奈米時開始有輕微的量子侷限效應產生，亦會反映在材料的電漿損失能量上，這行為在材料線徑小於10奈米時更為明顯，證明氧化鋅奈米線的尺度即使大於該材料之激子波爾半徑仍會有量子侷限效應產生。

Abstract
In this work, the study is to improve the analysis of the transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) in nanomaterial system. In nanoscale, the property, structure and composition of materials will be changed due to quantum effect and surface effect. Therefore, how to understand and control these three parameters is very important to design and apply the materials in nanotechnology. The advantage of field emission TEM is owns very high spatial resolution such as 1~2Å and can do individual analysis or measurement for each nanomaterails system. Besides, combining the theoretical calculation and electron energy loss spectrum collected the energy loss electrons can reveal the material properties. Although energy filtered TEM (EFTEM) can provide two dimensional information of chemical distribution (composition), it can not give properties information. Therefore, the new electron spectroscopic imaging series technique (ESI), which named advanced ESI technique is develop to improve the energy resolution of EEL-spectra, increasing the sampling of raw data and removes the noise and article by employing three numerical methods as maximum entropy deconvolution (MEM), fast Fourier interpolation and wavelet denoising method. The EEL-spectra which extracted from the newly developed advanced ESI technique is not only provide the properties of materials but also can do the quantification analysis.
The noise which caused by the environment or recording system (CCD or image plate) is one of the problems in the high resolution image especially for high angle annular dark field image (HAADF) in scanning transmission electron microscopy (STEM) and it will reduce the spatial resolution and image quality. We study the noise behavior in HAADF image and demonstrate wavelet denoising method as the best method because not only reducing the noise contribution in HAADF image but also restorimg the image quality, resolution and Z-contrast ability.
In the last session of this work, combing the high resolution TEM, EELS and photoluminescence (PL) analysis, the properties of different diameter ZnO nanowires have been investigated. First, the PL-spectra of different ZnO nanowires reveal the green emission will increase while the diameter decreased and the ratio of green/UV emission is almost consisted with the surface-to-volume (S/V) ratio of nanowires. For further analysis, the bandgap measurement from surface and center region of individual nanowires was done by low loss EELS analysis technique. These results indicate that the surface effect will predominate the photoluminesence of ZnO nanowires. The oxygen vacancy is identified as green emission mechanism by comparing with Zn L2,3 core loss EEL-spectrum and theoretical calculation with different defect model by FEFF V8.2 code which based on the real space multiple scattering calculation. The quantum confinement effect which contributed in plasmon loss energy is observed while the diameter of ZnO nanowires small than 20nm and it becomes more obviously in 10nm and smaller. The relationship of the quantum confinement effect and plasmon loss energy is derived by simply quantum mechansim. The correlation of the quantum confinement effect and diameter of ZnO nanowires can be found by fitting with experimental data. The experimental results also reveal the quantum confinement effect can be observed in the weak confinement region.

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