摘要
本論文中我們發展了一套二維電感耦合式乙炔電漿源流體模擬程式。流
體模型中我們考慮了中性氣體及帶電荷粒子的連續方程式與電子的能量
守恆方程式，計算電漿中各種粒子密度及電子溫度的空間分佈。程式中
利用馬克斯威爾方程式計算電漿腔內的感應電場分佈；並利用帕松方程
式解空間中的靜電場分佈。模擬的電漿腔體為圓柱型，高18公分，半
徑17公分；在側邊有三圈感應線圈。模擬中考慮了27種不同的粒子，包含電子、16種中性粒子與10種離子，化學反應式中考慮了電子碰撞游離反應、電子碰撞解離反應、離子與中性粒子反應、中性粒子間反應。
邊界壁上反應則只考慮離子在邊界上的中性化反應。
模擬結果在氣壓100mTorr，進氣為乙炔氣體100sccm，電漿吸收功率為300W的情況下所得到的模擬結果為：主要反應區(電漿區)的電子密度達到7.42x1018(1/m3)；反應區內的平均電子溫度為1.1eV；電漿中主要的離子依密度大小由高到低依次為C4H2+、C6H2+、C8H2+及H2+；氣體組成中依密度大小順序依次為H2、C4H2、C2H2與C6H2。電漿中自由基對碳管成長有很重要的影響，依密度大小順序依次為C4H3、C6H3
C8H、由於電漿中電子密度高，容易發生解離反應。C2H2在進入腔體後，容易被解離產生自由基C2H與H。C2H會與其他粒子反應生成質量更大的聚合物；而H則容易經化學反應產生H2。由結果發現電漿密度的大小，會影響電漿當中的氣體組成。當電漿密度高時解離反應增加會增加聚合物與H2密度。
另外我們也將模擬程式進行平行化，在多台PC架設MPI平行處理架構，利用分散式平行運算增快運算速度，減少模擬所需時間。

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