本研究嘗試建立UV-LIGA技術，配合相關高解析UV光刻與精密微電鑄製程，熱壓模造馬赫-任德光干涉儀(Mach-Zehnder Interferometer，MZI)平面光波導微結構，以進行可棄式、高靈敏度的塑膠光干涉式生物感測晶片之應用研究。

研究結果顯示，配合即時脫模機構與田口實驗的熱壓參數優化，本研究可以成功熱壓出最高解析度為1μm，深寬比為6的精密壓克力(PMMA)平面光干涉儀結構。並配合PMMA之折射係數(1310nm下)，本研究也成功藉由熱處理程序調變光波導核心材料(WGC)之折射率，以符合單模態傳輸的光波導設計需求。實際量測結果顯示，該模造MZI晶片有相不錯的導光效率(~5dB)，且6小時內的導光強度變異量約在4%以內。實驗中更進一步以不同濃度的食鹽水評估MZI塑膠晶片的檢測靈敏度，初步結果顯示該晶片可檢測到10^-9g/ml的食鹽水濃度，亦即10^-11之折射率變化。

此外，本研究也嚐試利用共軛(conjugated)奈米金粒子之生物分子，藉由金粒子與生物分子的明顯折射率差異，進ㄧ步提升MZI生物晶片的檢測靈敏度。實驗結果顯示，藉由奈米金粒子的耦合，成功地將SU-8製的MZI晶片的檢測靈敏度由原來的10^-12g/ml提升至10^-14g/ml。未來若同時結合熱壓MZI晶片與奈米金粒子技術，可提供低價、可棄式與高靈敏度的塑膠檢測晶片，將有助於疾病的早期檢測與防治。

This study try using UV-LIGA technology, coupled with UV lithography and micro electroforming technique, to hot-emboss a high resolution and high aspect-ratio microstructure for a planar Mach-Zehnder Interferometer (MZI). The polymer MZI chip will be used as a portable, high
sensitivity biochemical sensor.

In cooperated with a real-time demolding mechanism, the experimental results showed that the MZI microstructure can be hot embossed in PMMA material with a minimum feature size of 1μm and an aspect ratio of 6 after processes optimization of the Taguchi methods. A composite material
of WGC was then spin-coated in the molded PMMA microstructure as the core of the waveguide.
The refractive index of the WGC material was modulated providing single mode transmission of the NIR light source. Optical measurement results showed that transmission efficiency of the molded MZI is good (~5 dB), and the deviation of the transmission intensity could be as low within 4%. The measurement results also indicate that the molded MZI chip can detect a concentration change of 10^-9g/ml of the sodium chloride solution, which corresponding to a refractive index
change of 10^-11.

In addition, the antibody-conjugated gold nanoparticles were tried to enhance the sensitivity of the MZI sensor since the refractive index difference is quite large between gold and bimolecular. By using the gold nanoparticles, the measurement results showed that the detection sensitivity of the SU-8 MZI chip can be improved from 10^-12g/ml to 10^-14g/ml. Once the molded MZI
chip coupled with nanoparticle amplification, the low-cost, portable and high-sensitivity biosensing scheme will benefit the detection, prevention and curing of decease.

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