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| 研究生： |
梁元彰 |
|---|---|
| 論文名稱： |
磊晶BaTiO3/LaNiO3人工超晶格特性之研究 |
| 指導教授： |
吳泰伯
李信義 |
| 口試委員: | |
| 學位類別： |
博士 Doctor |
| 系所名稱： |
工學院 - 材料科學工程學系 Materials Science and Engineering |
| 論文出版年： | 2004 |
| 畢業學年度： | 92 |
| 語文別： | 英文 |
| 論文頁數： | 158 |
| 中文關鍵詞： | 人工超晶格 、X光反射率 、界面粗糙度 、成長機制 |
| 外文關鍵詞： | superlattice, Xray reflectivity, interface roughness, growth mode |
| 相關次數： | 點閱：3 下載：0 |
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本實驗成功的利用磁控濺鍍法製造出磊晶BaTiO3/LaNiO3(BTO/LNO)人工超晶格薄膜於單晶SrTiO3 基板上。藉由X光反射率以及X光繞射的量測證實了超晶格結構的形成。由 X光繞射分析顯示在超晶格中的BTO層其c軸的晶格常數會因為界面處的應變而拉長，並造成介電常數的顯著提升。另外，in-plane X光繞射分析亦顯示當BTO/LNO人工超晶格薄膜的周期小於20奈米時，超晶格中的BTO層會有相同程度的應變鬆弛。藉由X光反射率以及X光繞射的量測可發現幾乎固定的界面粗糙度存在於BTO與LNO層之間。因此人工超晶格薄膜具有相同程度的介電常數提升此外BTO/LNO 的界面具有高導電的特性。利用in-situ 鍍膜方式配和同步輻射光源成功的以實驗方式得到了周期為6奈米的人工超晶格薄膜其有效的臨界厚度約為60-66奈米，此實驗值亦相當接近理論估計值。當整體的超晶格薄膜厚度大於此臨界值，晶格會有應變鬆弛產生。此外in-situ的實驗觀察亦顯示出存在於超晶格內的應變會對於超晶格薄膜的顯微結構演化有著重大的影響。
Artificial superlattices consisting of ferroelectric BaTiO3 (BTO) and conductive LaNiO3 (LNO) sublayers were epitaxially grown on SrTiO3 (001) single crystal substrates by a dual-gun rf magnetron sputtering system. The formation of superlattice structure was confirmed from the x-ray reflectivity curves and (0 0 L) Bragg reflection of x-ray. A partial but nearly constant relaxation of in-plane strain in the superlattices was observed, even though the sublayer thickness is below the critical value for the generation of misfit dislocations. X-ray reflectivity measurement reveals that the superlattices with stacking period below 20nm have about the same interface roughness of BTO/LNO. Consequently, nearly the same extent of dielectric enhancement results from the strained BTO layer, along with a highly conductive interface zone in the superlattiecs. On the other hand, in-situ, real-time synchrotron x-ray scattering experiment confirms the occurrence of lattice strain relaxation in the superlattice with stacking period below critical value (BTO-3nm/LNO-3nm), and the experimentally evaluated total thickness of the superlattice for the onset of strain relief is satisfactorily close to the prediction from theoretical calculation. Moreover, observation of roughness scaling behavior in the initial growth of epitaxial BTO/LNO superlattices indicates that the strain plays an important role in the evolution of microstructure in superlattices.
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