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研究生: 劉俊傑
Liu, Jiun-Jie
論文名稱: 8×32 CMOS電容式觸覺感測器陣列和8位元連續漸近式類比數位轉換器的設計與製作
Design and Implementation of a 8×32 CMOS MEMS capacitive tactile Sensor array with an 8-bit Successive Approximation Analog-to-Digital Converter
指導教授: 盧向成
Lu, Shiang-Cheng
口試委員: 邱一
Chiu, Yi
劉承賢
Liu, Cheng-Hsien
盧向成
Lu, Shiang-Cheng
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2011
畢業學年度: 99
語文別: 中文
論文頁數: 88
中文關鍵詞: 電容感測指紋感測微機電連續漸近式類比數位轉換器
外文關鍵詞: Capacitive, CMOS MEMS, Fingerprint, SARADC
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  • 這項研究,成功的設計並製造出整合於積體電路上的指紋感測器與類比數位轉換器,利用CMOS後製程產生8×32感測陣列,每一感測元件由金屬層與介電層組合而成,所以不需再作額外的薄膜沉積,而感測電路置於感測元件下方來縮小晶片面積並進一步提高感測度。每一感測元件大小55 um×55 um,影像解析度為461 dpi,起始的電容值為12 fF,此晶片的平均感測度為2.1 fF/Mpa而輸出靈敏度為206 mV/Mpa,得到指紋感測器輸出的類比訊號後經由八位元連續漸近式類比數位轉換電路產生數位輸出,類比數位轉換器取樣率0.5MHz;最後晶片搭配FPGA將數位資料取出由電腦來產生二維圖像,可以成功的擷取指紋圖像。


    第1章 緒論 1 1-1 研究動機 1 1-2 微機電技術簡介 2 1-3 文獻回顧 4 1-3-1 光學式感測 7 1-3-2 熱感應式感測 8 1-3-3 晶片式感測 9 第2章 指紋感測器之原理及設計 14 2-1 指紋感測原理 14 2-2 感測器架構 17 2-3 感測結構設計 18 2-4 感測電路設計 21 2-5 感測結構與電路模擬 29 2-5-1 感測電容結構模擬 29 2-5-2 感測電路模擬 33 第3章 類比數位轉換器 37 3-1 類比數位轉換器簡介 37 3-1-1 快閃式類比數位轉換器 38 3-1-2 管線式類比數位轉換器 39 3-1-3 雙斜率式類比數位轉換器 39 3-1-4 連續漸近式類比數位轉換器 40 3-2 類比數位轉換器規格 40 3-3 連續漸近式類比數位轉換器設計 45 3-3-1 取樣保持電路 47 3-3-2 比較器電路 48 3-3-3 控制邏輯與輸出暫存電路 51 3-3-4 數位類比轉換電路 52 3-4 類比數位轉換器模擬結果 53 第4章 晶片量測 58 4-1 量測簡介 58 4-2 感測器後製程 58 4-2-1 製程儀器介紹 58 4-2-2 濕蝕刻 59 4-2-3 反應式離子蝕刻 60 4-3 類比數位轉換器量測 61 4-3-1 量測儀器介紹 61 4-3-2 類比數位轉換器靜態量測 63 4-3-3 類比數位轉換器動態量測 69 4-4 指紋量測 61 4-4-1 量測儀器介紹 72 4-4-2 指紋感測陣列量測 75 4-4-3 指紋感測分析 78 4-4-4 指紋感測器量測 79 4-5 規格整理 82 4-5-1 類比數位轉換器規格 82 4-5-2 指紋感測器規格 82 4-5-3 晶片照相 83 第5章 結論. 84 5-1 研究成果與討論 84 5-2 未來工作 84 第6章 參考文獻 85

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