研究生: |
莊祖維 |
---|---|
論文名稱: |
含0.25μm BCD製程中接面場效電晶體之微機電麥克風讀出電路 A MEMS microphone readout circuit with on-chip JFET in 0.25μm BCD process |
指導教授: | 徐永珍 |
口試委員: |
郭明清
盧向成 |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering |
論文出版年: | 2014 |
畢業學年度: | 102 |
語文別: | 中文 |
論文頁數: | 62 |
中文關鍵詞: | 接面場效電晶體 |
外文關鍵詞: | JFET |
相關次數: | 點閱:4 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
近年來,隨著CMOS-MEMS製程的進步,微機電麥克風取代了傳統駐極體式麥克風成為主流,應用於不同的消費性電子產品上。由於微機電麥克風的電容變化相當微小,因此需要低雜訊的讀出電路將訊號放大並讀出。
本論文於0.25μm BCD製程下設計一接面場效電晶體(JFET)元件當作讀出電路的輸入緩衝器,並與低雜訊放大器整合在一起,相較於MOSFET,JFET有著較低的閃爍雜訊。藉由JFET低雜訊的特性,將閃爍雜訊最小化,改善傳統上使用大面積MOSFET降低閃爍雜訊而造成感測器訊號衰減的問題。
為驗證JFET之可行性,設計另一組以MOSFET作為輸入緩衝器的對照組做比較。由量測結果證實,採用JFET版本之架構,可降低閃爍雜訊,相比於MOSFET版本之架構有較小的輸入相關雜訊。
In recent years, with the progress of CMOS-MEMS technology, MEMS microphone gradually replaced the traditional Electret Condenser Microphone (ECM) and became the mainstream in consumer electronic products. Due to the small capacitance change single from MEMS microphone is quite small, a low noise readout circuit is needed to amplify the signal.
Conventionally, the MOSFET with large size was used to reduce flicker noise, but it also caused the degradation of sensor signal. JFET has lower flicker noise than MOSFET so we designed a JFET as the input buffer for readout circuit to solve the problem and integrated the low noise amplifier with it. This IC was fabricated with TSMC 0.25μm BCD process.
In order to verify the feasibility, we designed another circuit in which the JFET input buffer was replaced by a MOSFET as control group of samples. Confirmed by the measurement results, using JFET in the amplifier can reduce flicker noise, and compared to the MOSFET version obtain lower input referred noise.
[1] Knowles Electronic website, http//www.knowles.com
[2] Yole Developement website, http//www.yole.fr
[3] A. Dec, H. Akima, R. Mohn and K. Suyama, “Audio Pre-Amplifiers for Digital Electret Microphones in 0.18um CMOS Process,” in Proc. of IEEE International Symp. on Circuits and Systems, May 2009, pp. 2489-249 .
[4] M. Baker and R. Sarpeshkar, “A Low-Power High-PSRR Current-Mode Microphone Preamplifier, ” IEEE Journal of Solid-State Circuits, vol. 38, no. 10, pp. 1671-1678, Oct.2003 .
[5] F. A. Levinzon, “Noise of the JFET Amplifier,” IEEE Trans. Circuits Syst. I: Fundamental Theory and Applications, vol. 47, pp. 981 – 985, 2000.
[6] S.C. Ko, C.H. Jun, WI. Jang and C.A. Choi, “Micromachined air-gap structure MEMS acoustic sensor using reproduciblehigh-speed lateral etching and CMP process” Journal of Micromechanics and Microengineering, vol. 16, pp. 2071-2076, 2006
[7] 劉霽逵, "應用於微機電麥克風之讀出電路",碩士論文 ,清華大學 ,新竹
2012.
[8] C.C. ENZ and G.C.Temes, ”Circuit techniques for reducing the effects of op-amp imperfections: autozeroing , correlated double sampling, and chopper stabilization.” Proc.IEEE, vol.84. no.11, pp.1584-1614, Nov.1996
[9] J. Citakovic, “New Technology-Driven Approaches in the Design of Preamplifiers for Condenser Microphones , ” Ph.D. dissertation, Technical University of Denmark, Denmark , 2009
[10] L. Picolli , M. Grassi, L. Rosson , P. Malcovati and A. Fornasari, “A 1.0 mW, 71 dB SNDR, −1.8 Dbfs input swing, fourth-order ΣΔ interface circuit for MEMS microphones” in proc. of ESSCIRC, Sep. 2009, pp. 324 -327,.
[11] J. Citakovic , et al., "A compact CMOS MEMS Microphone with 66dB SNR", in IEEE Int. Solid-State Circuits Conf, Feb. 2009, pp. 350-351
[12] B. Razavi, Design of Analog CMOS Integrated Circuits, McGraw-Hill, 2003.
[13] Y. Fu, H. Wong, and J. J. Liou, "Characterization and modelling of flicker noise in junction field-effect transistor with source and drain trench isolation", Microelectronics Reliab., vol. 47, pp. 46-50, 2007.
[14] A. Sedra and K. C. Smith, Microelectronic Circuits, Oxford.New York.1998.
[15] 林彥宏,“0.25微米BCD製程之高電流增益BJT元件與JFET元件設計”, 碩士論文 ,清華大學 ,新竹, 2008.
[16] J. F. Dickson , “On-chip high-voltage generation in NMOS integrated circuits using an improved voltage multiplier technique,” IEEE Journal of Solid-State Circuits, vol. 11, no. 6, pp. 374-378, May 1976.
[17] M.D. Ker, S.L. Chen and S.C. Tsai, “Design of Charge Pump Circuit with Consideration of Gate-Oxide Reliability in Low-Voltage CMOS Process,” IEEE Journal of Solid-State Circuits, vol. 41, no. 5, pp. 1100-1107, May 2006.