半導體產業生命週期短、產品變動大、製造成本高，因此，在晶圓製造過程中，為了提升產品良率，必須設置許多適當的量測站及檢驗點為為確保晶圓品質良好的必要措施。若能即時性的品質量測和檢測管制，將能有效監控生產線上製程參數是否符合規格，及早發現出製造過程中的偏離及錯誤，進一步達到改善產品良率提升品質水準的目的。
本研究主要以紫式決策分析架構為基礎，定義一套精簡有效的晶圓量測抽樣決策方法，在考慮品質、成本、時間等目標情況下，調整適當的抽樣量測計畫和抽樣頻率，來有效即時性反映晶圓品質，達到降低抽樣成本及維持檢測精確之目的。

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