研究生: |
林鈺祥 Lin, Yu-Hsiang |
---|---|
論文名稱: |
紅熒烯薄膜成長與其電晶體電性之臨場表現研究 In-situ growth and electrical characterization studies of rubrene thin film transistors. |
指導教授: |
楊耀文
Yang, Yaw-Wen |
口試委員: |
林滄浪
張瑞芬 楊耀文 |
學位類別: |
碩士 Master |
系所名稱: |
理學院 - 化學系 Department of Chemistry |
論文出版年: | 2013 |
畢業學年度: | 101 |
語文別: | 中文 |
論文頁數: | 128 |
中文關鍵詞: | 紅熒烯 、臨場 、場效電晶體 |
外文關鍵詞: | rubrene, OTFT, in-situ |
相關次數: | 點閱:2 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本論文報導運用臨場電性量測技術來研究紅熒烯(rubrene)薄膜電晶體製作過程中,電晶體電性表現與薄膜厚度之變化關係。且利用不同層數之正二十酸鎘(Cadmium arachidate,CdA)薄膜作為基材,來改變基材表層島狀結構的密度,並成長rubrene薄膜於此經過CdA多層膜修飾後之基材。將CdA薄膜與rubrene薄膜分別藉由原子力顯微鏡(Atomic Force Microscope,AFM)、X光繞射(X-ray Diffraction,XRD)、近緣X光吸收細微結構(Near-edge X-ray Absorption Fine Structure,NEXAFS)與光學顯微鏡來分析表面形貌、結構、分子位向與薄膜外觀。
成長rubrene薄膜在具有苯環官能基表面之基材上,可觀察到其rubrene薄膜表面形貌高低差異大,且薄膜為非晶相。再基材經CdA多層膜修飾後,基材表面具豐富結構島狀形貌,於上成長出之rubrene薄膜,其表面形貌較呈平板片狀,且薄膜具高晶相,而且rubrene分子較站立於基材表面。
以4層CdA薄膜成長於具長碳鏈官能基表面作為基材,所製作出之rubrene薄膜電晶體,在臨場量測電晶體特性時,可觀察到電晶體效能隨薄膜厚度而穩定增加,可於rubrene薄膜厚度35 nm時開始量測到場效電晶體特性,此時載子遷移率為4.58 × 10-4 cm2/Vs,而隨薄膜厚度增厚其電晶體載子遷移率也不斷向上提升,當厚度達140 nm時量測到最佳載子遷移率為0.16 cm2/Vs,經熱退火後處理後更提高至0.32 cm2/Vs。而電流開關比約為105,門檻電壓約在-25V。.
We present in-situ transport measurement of rubrene thin film transistors. The rubrene based transistors were fabricated form rubrene grown onto the SiO2/Si substrate modified by Cadmium arachidate (CdA) multi-layers or self-assembled organosilane. The morphology, structure and crystallinity of CdA substrate and rubrene film were characterized by optical microscope, atomic force microscopy (AFM), near-edge absorption fine structure (NEXAFS), x-ray diffraction (XRD).
Rubrene film grown on the substrate modified by aromatic terminated silane, the film shows the irregular pillar-like morphology and amorphous structure. Rrubrene film on multi-layers CdA substrate present more plate-like features and reveal the strong (200)-oriented crystallites on the surface. In addition, the ring plane of the aromatic core of rubrene molecule is stand-up configuration from thin to thick thickness of rubrene films.
The transistor was fabricated form rubrene grown on 4 layers CdA film on SiO2/Si substrate modified by alkyl terminated silane have the characteristic of field effect transistor form 35 nm thickness of rubrene, and the hole mobility is 4.58 × 10-4 cm2/Vs. The hole mobility is increased after increasing the thickness of rubrene film. The highest mobility of 0.16 cm2/Vs was obtained when the rubrene film thickness reached to 140 nm. The final mobility was improved to 0.32 cm2/Vs, after the rubrene film was treated by post thermal annealing.
(1) Thompson, S. E.; Parthasarathy, S. Mater. Today 2006, 9, 20.
(2) D. Kahng, M. M. A. IRE Solid State Device Research Conference, Carnegie Institute of Technology, Pittsburgh PA 1960.
(3) Koezuka, H.; Tsumura, A.; Ando, T. Synth. Met. 1987, 18, 699.
(4) Samsung Consumer Electronics Show 2013.
(5) Facchetti, A. Mater. Today 2007, 10, 28.
(6) Gill, W. D. J. Appl. Phys. 1972, 43, 5033.
(7) Sundar, V. C.; Zaumseil, J.; Podzorov, V.; Menard, E.; Willett, R. L.; Someya, T.; Gershenson, M. E.; Rogers, J. A. Science 2004, 303, 1644.
(8) Takeya, J.; Yamagishi, M.; Tominari, Y.; Hirahara, R.; Nakazawa, Y.; Nishikawa, T.; Kawase, T.; Shimoda, T.; Ogawa, S. Appl. Phys. Lett. 2007, 90, 102120.
(9) Miwa, J. A.; Cicoira, F.; Bedwani, S. p.; Lipton-Duffin, J.; Perepichka, D. F.; Rochefort, A.; Rosei, F. J. Phys Chem. C 2008, 112, 10214.
(10) Park, S.-W.; Hwang, J. M.; Choi, J.-M.; Hwang, D. K.; Oh, M. S.; Kim, J. H.; Im, S. Appl. Phys. Lett. 2007, 90, 153512.
(11) Dinelli, F.; Murgia, M.; Levy, P.; Cavallini, M.; Biscarini, F.; de Leeuw, D. M. Phys. Rev. Lett. 2004, 92, 116802.
(12) Kiguchi, M. Jpn. J. Appl. Phys. 2003, 42.
(13) Gao, J.; Xu, J. B.; Zhu, M.; Ke, N.; Dongge, M. J. Phys. D: Appl. Phys. 2007, 40, 5666.
(14) Dimitrakopoulos, C. D.; Malenfant, P. R. L. Adv. Mater. 2002, 14, 99.
(15) Chua, L.-L. Z., Jana. Chang, Jui-Fen. Ou, Eric C.-W.. Ho, Peter K.-H.. Sirringhaus, Henning. Friend, Richard H. Nature 2005, 434, 6.
(16) Wang, S. D.; Miyadera, T.; Minari, T.; Aoyagi, Y.; Tsukagoshi, K. Appl. Phys. Lett. 2008, 93, 043311.
(17) Park, B.; In, I.; Gopalan, P.; Evans, P. G.; King, S.; Lyman, P. F. Appl. Phys. Lett. 2008, 92, 133302.
(18) Li, Z.; Du, J.; Tang, Q.; Wang, F.; Xu, J.-B.; Yu, J. C.; Miao, Q. Adv. Mater. 2010, 22, 3242.
(19) Hsu, C. H.; Deng, J.; Staddon, C. R.; Beton, P. H. Appl. Phys. Lett. 2007, 91, 193505.
(20) Rhee, S.-W.; Yun, D.-J. J. Mater. Chem. 2008, 18, 5437.
(21) Wang, C.-H.; Islam, A. K. M. M.; Yang, Y.-W.; Wu, T.-Y.; Lue, J.-W.; Hsu, C.-H.; Sinha, S.; Mukherjee, M. Langmuir 2013, 29, 3957.
(22) Newman, C. R.; Frisbie, C. D.; da Silva Filho, D. A.; Brédas, J.-L.; Ewbank, P. C.; Mann, K. R. Chem. Mater. 2004, 16, 4436.
(23) Ulman, A. An Introduction to Ultrathin Organic Films: From Langmuir-Blodgett to Self-Assembly; Academic Press, 1991.
(24) 國家同步輻射研究中心.
(25) John C. Vickerman, I. S. G. Surface Analysis - The Principal Techniques; John Wiley & Sons, Ltd, 1997.
(26) Stöhr, J. NEXAFS Spectroscopy; Springer, 1992.
(27) de Oteyza, D. G.; Barrena, E.; Osso, J. O.; Dosch, H.; Meyer, S.; Pflaum, J. Appl. Phys. Lett. 2005, 87, 183504.
(28) Bao, Z.; Lovinger, A. J.; Brown, J. J. Am. Chem. Soc. 1998, 120, 207.
(29) Chen, W.; Chen, S.; Huang, H.; Qi, D. C.; Gao, X. Y.; Wee, A. T. S. Appl. Phys. Lett. 2008, 92, 063308.
(30) Hirose, T.; Nagase, T.; Kobayashi, T.; Ueda, R.; Otomo, A.; Naito, H. Appl. Phys. Lett. 2010, 97, 083301.
(31) Das, N. M.; Roy, D.; Gupta, M.; Gupta, P. S. Physica B: Condensed Matter 2012, 407, 4777.
(32) Park, S.-W.; Jeong, S. H.; Choi, J.-M.; Hwang, J. M.; Kim, J. H.; Im, S. Appl. Phys. Lett. 2007, 91, 033506.
(33) Zeng, X.; Zhang, D.; Duan, L.; Wang, L.; Dong, G.; Qiu, Y. Appl. Surf. Sci. 2007, 253, 6047.
(34) Schöll, A.; Fink, R.; Umbach, E.; Mitchell, G. E.; Urquhart, S. G.; Ade, H. Chem. Phys. Lett. 2003, 370, 834.
(35) Schertel, A.; Hahner, G.; Grunze, M.; Woll, C.; 3 ed.; AVS: Mineapolis, Minnesota (USA), 1996; Vol. 14, p 1801.
(36) Urquhart, S. G.; Ade, H. J. Phys. Chem. B 2002, 106, 8531.
(37) Käfer, D.; Ruppel, L.; Witte, G.; Wöll, C. Phys. Rev. Lett. 2005, 95, 166602.
(38) Song, X.; Wang, L.; Fan, Q.; Wu, Y.; Wang, H.; Liu, C.; Liu, N.; Zhu, J.; Qi, D.; Gao, X.; Wee, A. T. S. Appl. Phys. Lett. 2010, 97, 032106.