本研究設計以及製造不同材料與圖案的模仁，包含微米矽模仁、次微米矽模仁以及微米鎳模仁，並成功的開發其超音波奈米轉印微影技術。研究結果顯示在室溫下能將不同材料、不同線寬等級的模仁圖案轉印至PET基板上。超音波奈米轉印微影技術主要是利用超音波產生振動使模仁與聚合物產生摩擦並提升溫度至聚合物的玻璃轉換溫度之上，再利用壓力使模仁壓入因高溫軟化的聚合物內。研究中以填滿率作為評量轉印效果品質的性能指標，並利用田口品質方法求得不同形式模仁之最佳化製程參數，最後探討模仁材料以及圖案對超音波奈米轉印微影技術的影響。

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