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研究生: 林志和
Chih-Ho Lin
論文名稱: 矽鍺異質接面雙載子電晶體之量子效應
The Quantum Effect Characteristics of SiGe Heterojunction Bipolar Transistor
指導教授: 龔正
Jeng Gong
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2004
畢業學年度: 92
語文別: 中文
論文頁數: 60
中文關鍵詞: 矽鍺異質接面量子效應
外文關鍵詞: SiGe, HBT, Quantum Effect
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  • 摘要
    近年來,隨著通訊產業的快速發展,工業界以及學術界無不全力發展通訊IC,而在通訊系統中,最重要的骨架即是高頻微波元件。而隨著分子束磊晶(Molecular Beam Epitaxy)以及化學氣相沈積(CVD)的進步,製造出高品質的磊晶層已不是問題,故可生成品質良好之異質接面結構,而藉由能帶工程的改良,可製作出性能遠較同質接面雙載子電晶體(BJT)佳之矽鍺異質接面雙載子電晶體(SiGe HBT),SiGe
    HBT在射極-基極接面具有較高之射極注入效益;基極中由於有加速電場,故有較短之基極穿越時間(Base-Transient Time),因此有較高之截止頻率fT(Cut-off Frenquency),而隨著製程之進步,目前SiGe
    HBT之截止頻率已可達350GHz以上。
    在本篇論文中,首先回顧矽鍺異質接面雙載子電晶體(SiGe HBT)現有之能帶理論以及在電流 vs. 電壓所表現出來之特性。由於在基極區域之能隙大小比集極區域小,故在基極-集極接面處,將會有能帶不連續的情形,而由薛丁格方程式可得出傳導帶之能帶不連續△Ec將有兩量子能階的存在,因此當射極-基極順向偏壓Vbe偏壓在正常工作區間,然後掃瞄基極-集極超高反向偏壓Vcb,可發現在圖IC vs. Vcb以及IB vs. Vcb上將會有Current Jump的發生,此是因為量子能階上之電子穿遂至集極空乏區後,經由累增效應放大所形成,而我們分別在不同之射極-基極順向偏壓Vbe以及不同溫度條件下,分析此現象的改變。


    Abstract
    In this work, we first review the bandgap theory of the SiGe Heterojunction Bipolar Transistor (HBT), and it's current vs. voltage characteristics. Because the base region bandgap is smaller than that of collector region, so, it has bandgap discontinuity nearthe base-collector
    junction. From the Schrodinger Equation, it can be derived
    that two discrete quantum energy levels exist in the
    conduction band discontinuity. When the emitter-base junction is forward biased by a voltage Vbe on the normal working region, then sweep the base-collector reverse biased voltage Vcb, We can find current jumps in the figure of IC vs. Vcb and IB vs. Vcb. This is because the electron in the discrete quantum energy level will penetrate to the
    depletion region of the collector, then enlarged by the
    multiplication effect. This effect is analyzed under different emitter-base forward bias voltage Vbe ,and under different temperatures.

    目 錄 摘要.....................................................Ⅰ 誌謝.....................................................Ⅲ 目錄.....................................................Ⅳ 圖目錄...................................................Ⅵ 表目錄...................................................XI 第一章 緒 論...............................................1 1.1前言..........................................1 第二章 理論回顧.........................................3 2.1 同質接面雙載子電晶體................................. 3 2.2 矽鍺異質接面雙載子電晶體(SiGe HBT).......... 6 2.2.1 能帶不連續(Bandgap Discontinuity).................. 8 2.2.2 能隙窄化(Bandgap Narrowing)....................... 10 2.2.3 二維電子氣(2-DEG)..................................12 2.2.4 高階注入能障效應(High Injection Barrier Effect)....14 2.2.5 熱激發或穿遂電流(Thermionic or Tunneling Current)...........................................19 第三章 量測結果與證明....................................21 3.1 Gummel plot..........................................21 3.2 集極、基極電流 vs.基極-集極反向偏壓(IC、IB vs. Vcb)..24 3.2.1 Vcb正常操作區間................................... 24 3.2.2 Vcb高壓操作區間................................... 27 3.3 量子能階導證........................................ 31 3.3.1 能帶不連續△Eg、△Ev、△Ec推導.................... 31 3.3.2 兩量子能階驗證.....................................32 第四章 量測結果分析....................................40 4.1 不同Vbe偏壓影響......................................40 4.2 溫度效應............................................ 46 第五章 結論............................................57 參考文獻.................................................58

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