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研究生: 林杰廷
Lin, Chieh-Ting
論文名稱: 折射係數感測以及表面增益紅外線吸收感測的雙功能超材料吸收體
A Metamaterial Absorber Bifunctional Sensor Based on Refractive Index and Surface Enhanced Infrared Absorption Sensing
指導教授: 嚴大任
Yen, Ta-Jen
口試委員: 陳浩夫
Chen, How-Foo
黃宗鈺
Huang, Tsung-Yu
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 英文
論文頁數: 58
中文關鍵詞: 超材料完美吸收體法諾共振折射係數表面增強紅外光吸收
外文關鍵詞: metamaterial, perfect absorber, Fano-resonance, refractive index, SEIRA
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  • 在這篇論文中,我們設計一個以隙環共振器為主的超材料吸收體,希冀能夠達成同時具有折射率感測以及表面增強紅外光吸收檢測效應的雙功能感測器功能。在折射率感測部分中,我們利用超材料吸收體的共振頻率會隨著環境折射率的變化而偏移的特性,來監測環境的折射率。由於我們的目標工作頻率為中紅外區域,其具有較強烈的水吸收峰值,所以我們選擇不同厚度的聚甲基丙烯酸甲酯(PMMA)作為待測物,並由Maxwell Garnett方程式計算出在不同厚度情況下對應的折射率。在模擬中,該超材料吸收體的檢測靈敏度可高達到1602.5 nm/RIU。而在實驗部分,量測出的檢測靈敏度亦接近993.8 nm/RIU,與模擬結果極為接近。另一方面,我們亦檢測了超材料吸收體在表面增強紅外光吸收檢測的能力。此處,吸收體的共振模式會與位於相同頻率待測物的分子振動模式重疊,並產生“法諾共振”(Fano resonance),此共振模式會造成特徵頻譜的形狀反轉,使得我們更易於判斷待測物存在的與否。作為紅外光吸收檢測的目標分析物,我們選擇聚氯乙烯(PVC),這是一種在眾多行業中廣泛使用的常見聚合物。我們在模擬和實驗中確認了法諾共振的存在,且其檢測極限可以達到0.5%,成功地定性超材料吸收體在紅外光吸收檢測的表現。然而,受到低濃度PVC薄膜在超材料吸收體分佈不均的阻礙,我們未能定量分析表面增強紅外光吸收信號和PVC濃度的關係。總結以上研究成果,我們成功地提出了一個具有折射率感測以及表面增強紅外光吸收特性之雙功能超材料吸收體感測器,在實驗中其折射率感測靈敏度可接近1000 nm/RIU。然而,其缺乏用於表面增強紅外光吸收來定量檢測PVC的濃度。


    In this dissertation, we develop a split-ring resonator based metamaterial absorber (MA) to achieve a bifunctional sensor of refractive index and surface enhanced infrared absorption sensing. For the design of a refractive index sensor, we use the property that the operating frequency of the MA would shift according to environmental refraction index to detect the index change of environments. Here, our target frequency is located at mid-infrared regime, which reveals strong water absorption at this regime, so we choose polymethyl methacrylate (PMMA) with different thicknesses as our analytes to testify the behavior of our proposed MA. Note that the corresponding refractive indices of PMMA with different thicknesses are calculated via Maxwell-Garnett formula. The simulated and experimentally measured sensitivities are up to 1602.5 nm/RIU and 993.8 nm/RIU, respectively, suggesting the good agreement between the simulation and measurement. On the other hand, we also characterize the properties of surface enhanced infrared absorption (SEIRA) from our proposed MA. In SEIRA, the operating frequency of the MA should be tuned to coincide with a vibrational mode of our targeted analytes to show ‘Fano resonance’ with inverted optical responses compared to absorption spectra of the MA only, facilitating the determination of the existence of the analytes. It is worth mentioning that the targeted analytes here is PVC, a commonly used polymer in every industrial field. We confirm the Fano resonance in the simulation and measurement with a detection limit down to 0.5%, qualitatively demonstrating the behavior of our MA in SEIRA detection. Yet, due to non-uniform distribution of PMMA on our MA, we cannot quantitatively draw a relationship between the concentration of PVC and measured SEIRA signals. In summary, we successfully proposed a bifunctional sensor with refractive index and surface enhanced infrared absorption sensing. The sensitivity of refractive index sensing could up to 1000 nm/RIU while the MA indeed reveals Fano resonance with the applied PVC. Still, the measured MA could not quantitatively distinguish the concentration of PVC when it is low.

    摘要 ii ABSTRACT iii ACKNOWLEGDEMENTS v TABLE OF CONTENTS vi LIST OF FIGURES viii LIST OF TABLES xii Chapter 1 INTRODUCTION 1 Chapter 2 LITERATURE REVIEW 3 2.1 Split Ring Resonator 3 2.2 Metal-dielectric-metal (MDM) Perfect Absorber 5 2.3 Refractive Index Sensors 7 2.4 Plasmonic and Metamaterial-based SEIRA Substrates 8 2.5 Motivation 17 Chapter 3 DESIGN AND SIMULATION 19 3.1 Design of the Split Ring Resonator and the Spacer 19 3.2 Simulation of Refractive Index Sensor 22 3.3 Simulation of Fano-resonance 25 3.4 Field Distribution of the Device 26 Chapter 4 EXPERIMENTAL PROCEDURE 28 4.1 Experimental Procedure 28 4.2 Physical Vapor Deposition and Lift-off Process 28 4.3 Electron Beam Lithography Process 30 4.4 Micro-Fourier Transform Infrared Spectroscopy (μ-FTIR) 33 Chapter 5 RESULTS AND DISCUSSION 35 5.1 Determination of Device Parameters 35 5.2 Refractive Index Sensing Ability 39 5.3 Pursuit of SEIRA Detection (Fano-profile) 46 5.4 Quantitative Analysis of SEIRA Detection 49 REFERENCE 55

    [1] L. B. Ware and M. A. Matthay, "The acute respiratory distress syndrome," New England Journal of Medicine, vol. 342, no. 18, pp. 1334-1349, 2000.
    [2] C. D. Chin, V. Linder, and S. K. Sia, "Lab-on-a-chip devices for global health: Past studies and future opportunities," Lab on a Chip, vol. 7, no. 1, pp. 41-57, 2007.
    [3] D. Erickson, S. Mandal, A. H. Yang, and B. Cordovez, "Nanobiosensors: optofluidic, electrical and mechanical approaches to biomolecular detection at the nanoscale," Microfluidics and nanofluidics, vol. 4, no. 1-2, pp. 33-52, 2008.
    [4] H. K. Hunt and A. M. Armani, "Label-free biological and chemical sensors," Nanoscale, vol. 2, no. 9, pp. 1544-1559, 2010.
    [5] R. Yan, S. P. Mestas, G. Yuan, R. Safaisini, D. S. Dandy, and K. L. Lear, "Label-free silicon photonic biosensor system with integrated detector array," Lab on a Chip, vol. 9, no. 15, pp. 2163-2168, 2009.
    [6] J. Homola, "Surface plasmon resonance sensors for detection of chemical and biological species," Chemical reviews, vol. 108, no. 2, pp. 462-493, 2008.
    [7] J. J. Mock, D. R. Smith, and S. Schultz, "Local refractive index dependence of plasmon resonance spectra from individual nanoparticles," Nano letters, vol. 3, no. 4, pp. 485-491, 2003.
    [8] A. Malima et al., "Highly sensitive microscale in vivo sensor enabled by electrophoretic assembly of nanoparticles for multiple biomarker detection," Lab on a Chip, vol. 12, no. 22, pp. 4748-4754, 2012.
    [9] Y. Chen and H. Ming, "Review of surface plasmon resonance and localized surface plasmon resonance sensor," Photonic Sensors, vol. 2, no. 1, pp. 37-49, 2012.
    [10] K. Chen, R. Adato, and H. Altug, "Dual-band perfect absorber for multispectral plasmon-enhanced infrared spectroscopy," Acs Nano, vol. 6, no. 9, pp. 7998-8006, 2012.
    [11] Y. Li, L. Su, C. Shou, C. Yu, J. Deng, and Y. Fang, "Surface-enhanced molecular spectroscopy (SEMS) based on perfect-absorber metamaterials in the mid-infrared," Scientific reports, vol. 3, p. 2865, 2013.
    [12] N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, "Perfect metamaterial absorber," Physical review letters, vol. 100, no. 20, p. 207402, 2008.
    [13] H. Wang, J. Kundu, and N. J. Halas, "Plasmonic nanoshell arrays combine surface‐enhanced vibrational spectroscopies on a single substrate," Angewandte Chemie International Edition, vol. 46, no. 47, pp. 9040-9044, 2007.
    [14] D. Enders and A. Pucci, "Surface enhanced infrared absorption of octadecanethiol on wet-chemically prepared Au nanoparticle films," Applied Physics Letters, vol. 88, no. 18, p. 184104, 2006.
    [15] M. Osawa, "Surface-enhanced infrared absorption," in Near-field optics and surface plasmon polaritons: Springer, 2001, pp. 163-187.
    [16] R. F. Aroca, D. J. Ross, and C. Domingo, "Surface-enhanced infrared spectroscopy," Applied spectroscopy, vol. 58, no. 11, pp. 324A-338A, 2004.
    [17] T. Wang, V. H. Nguyen, A. Buchenauer, U. Schnakenberg, and T. Taubner, "Surface enhanced infrared spectroscopy with gold strip gratings," Optics express, vol. 21, no. 7, pp. 9005-9010, 2013.
    [18] J. W. Petefish and A. C. Hillier, "Angle-tunable enhanced infrared reflection absorption spectroscopy via grating-coupled surface plasmon resonance," Analytical chemistry, vol. 86, no. 5, pp. 2610-2617, 2014.
    [19] A. W. Clark and J. M. Cooper, "Optical Properties of Multiple‐Split Nanophotonic Ring Antennae," Advanced materials, vol. 22, no. 36, pp. 4025-4029, 2010.
    [20] H. Aouani et al., "Ultrasensitive broadband probing of molecular vibrational modes with multifrequency optical antennas," Acs Nano, vol. 7, no. 1, pp. 669-675, 2012.
    [21] F. Neubrech, A. Pucci, T. W. Cornelius, S. Karim, A. García-Etxarri, and J. Aizpurua, "Resonant plasmonic and vibrational coupling in a tailored nanoantenna for infrared detection," Physical review letters, vol. 101, no. 15, p. 157403, 2008.
    [22] A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, "Fano resonances in nanoscale structures," Reviews of Modern Physics, vol. 82, no. 3, p. 2257, 2010.
    [23] W.-T. Lu, S.-J. Wang, W. Li, Y.-L. Wang, C.-Z. Ye, and H. Jiang, "Fano-type resonance through a time-periodic potential in graphene," Journal of Applied Physics, vol. 111, no. 10, p. 103717, 2012.
    [24] O. Sakai and K. Tachibana, "Plasmas as metamaterials: a review," Plasma Sources Science and Technology, vol. 21, no. 1, p. 013001, 2012.
    [25] S. Walia et al., "Flexible metasurfaces and metamaterials: A review of materials and fabrication processes at micro-and nano-scales," Applied Physics Reviews, vol. 2, no. 1, p. 011303, 2015.
    [26] M. Gil, J. Bonache, and F. Martin, "Metamaterial filters: A review," Metamaterials, vol. 2, no. 4, pp. 186-197, 2008.
    [27] Z. Chen, B. Guo, Y. Yang, and C. Cheng, "Metamaterials-based enhanced energy harvesting: A review," Physica B: Condensed Matter, vol. 438, pp. 1-8, 2014.
    [28] M. Hedayati, F. Faupel, and M. Elbahri, "Review of plasmonic nanocomposite metamaterial absorber," Materials, vol. 7, no. 2, pp. 1221-1248, 2014.
    [29] J. B. Pendry, A. J. Holden, D. J. Robbins, and W. Stewart, "Magnetism from conductors and enhanced nonlinear phenomena," IEEE transactions on microwave theory and techniques, vol. 47, no. 11, pp. 2075-2084, 1999.
    [30] D. R. Smith, W. J. Padilla, D. Vier, S. C. Nemat-Nasser, and S. Schultz, "Composite medium with simultaneously negative permeability and permittivity," Physical review letters, vol. 84, no. 18, p. 4184, 2000.
    [31] I. M. White and X. Fan, "On the performance quantification of resonant refractive index sensors," Optics express, vol. 16, no. 2, pp. 1020-1028, 2008.
    [32] Q. Zhao, J. Zhou, F. Zhang, and D. Lippens, "Mie resonance-based dielectric metamaterials," Materials today, vol. 12, no. 12, pp. 60-69, 2009.
    [33] V. Fedotov, M. Rose, S. Prosvirnin, N. Papasimakis, and N. Zheludev, "Sharp trapped-mode resonances in pla0nar metamaterials with a broken structural symmetry," Physical review letters, vol. 99, no. 14, p. 147401, 2007.
    [34] B. Lahiri, A. Z. Khokhar, M. Richard, S. G. McMeekin, and N. P. Johnson, "Asymmetric split ring resonators for optical sensing of organic materials," Optics express, vol. 17, no. 2, pp. 1107-1115, 2009.
    [35] J. Zhang, X. Zhang, X. Su, Y. Lu, S. Feng, and L. Wang, "Sensitivity enhancement through overlapping simultaneously excited Fano resonance modes of metallic-photonic-crystal sensors," Optics express, vol. 22, no. 3, pp. 3296-3305, 2014.
    [36] C.-Y. Chen, S.-C. Wu, and T.-J. Yen, "Experimental verification of standing-wave plasmonic resonances in split-ring resonators," Applied Physics Letters, vol. 93, no. 3, p. 034110, 2008.
    [37] Y.-T. Chang, Y.-C. Lai, C.-T. Li, C.-K. Chen, and T.-J. Yen, "A multi-functional plasmonic biosensor," Optics Express, vol. 18, no. 9, pp. 9561-9569, 2010.
    [38] J. Homola and M. Piliarik, "Surface plasmon resonance (SPR) sensors," in Surface plasmon resonance based sensors: Springer, 2006, pp. 45-67.
    [39] N. Verellen et al., "Plasmon line shaping using nanocrosses for high sensitivity localized surface plasmon resonance sensing," Nano letters, vol. 11, no. 2, pp. 391-397, 2011.
    [40] V. Giannini, Y. Francescato, H. Amrania, C. C. Phillips, and S. A. Maier, "Fano resonances in nanoscale plasmonic systems: a parameter-free modeling approach," Nano letters, vol. 11, no. 7, pp. 2835-2840, 2011.
    [41] C. Huck et al., "Surface-enhanced infrared spectroscopy using nanometer-sized gaps," Acs Nano, vol. 8, no. 5, pp. 4908-4914, 2014.
    [42] F. Neubrech et al., "Infrared optical properties of nanoantenna dimers with photochemically narrowed gaps in the 5 nm regime," ACS nano, vol. 6, no. 8, pp. 7326-7332, 2012.
    [43] P. H. Eilers, "A perfect smoother," Analytical chemistry, vol. 75, no. 14, pp. 3631-3636, 2003.
    [44] F. Neubrech and A. Pucci, "Plasmonic enhancement of vibrational excitations in the infrared," IEEE Journal of selected topics in quantum electronics, vol. 19, no. 3, pp. 4600809-4600809, 2013.
    [45] S. Narita, S. Ichinohe, and S. Enomoto, "Infrared spectrum of polyvinyl chloride. I," Journal of Polymer Science, vol. 37, no. 131, pp. 273-280, 1959.

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