研究生: |
謝名凱 Hsieh,Ming-Kai |
---|---|
論文名稱: |
利用外加電場對於絕緣矽中產生之光激發自由載子濃度分析 Enhanced photon-induced free carrier density in silicon-on-insulator via applying external electric field on the surface |
指導教授: |
李明昌
Lee,Ming-Chang |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies |
論文出版年: | 2008 |
畢業學年度: | 97 |
語文別: | 中文 |
論文頁數: | 71 |
中文關鍵詞: | free carrier lifetime 、all-optical modulation 、surface recombination 、soi |
外文關鍵詞: | 自由載子生命期, 全光調變, 表面復合, 絕緣矽 |
相關次數: | 點閱:2 下載:0 |
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在本論文中我們探討外加電場對於在絕緣矽中產生之光激發自由載子濃度的增益。藉由外加電場我們將靠近絕緣矽表面的能帶彎曲,使得絕緣矽表面附近的自由載子處於累積(accumulation)或反轉(inversion)情況,造成自由載子表面復合(surface recombination)機率可以有效的被減低。另外,我們也討論偏壓極性對於載子濃度的影響。施加偏壓於不同厚度的絕緣矽上,其載子濃度增益也會有不同的表現。此外,施加雙側偏壓所造成的載子濃度增益將比只施加單側邊壓還高,而雙側偏壓的載子濃度增益相當於兩邊單側偏壓所造成載子濃度增益的總和。
In this paper, we studied the enhancement of photon-induced free-carrier density in silicon-on-insulator (SOI) by applying electric field. Under such a bias, electronic band bends near the surface, resulting in the interface condition either in accumulation or inversion that depends on the polarity of bias voltage. Both conditions will effectively suppress the surface recombination. In addition, the photon-induced carrier density is also dependent on the thickness of SOI substrate. The enhancement due to two-side bias (bottom and top) is better than single-side bias, simply equivalent to two effects added together.
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