相位移差分干涉對比式三維形貌量測儀研究與開發

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研究生：	余昇剛 Yu, Sheng-Kang
論文名稱：	相位移差分干涉對比式三維形貌量測儀研究與開發 Study and Development of Three-Dimensional Topography Measurement System with Phase Shifting Differential Interference Contrast Technique
指導教授：	林士傑 Lin, Shih-Chieh
口試委員:	章明陳亮嘉陳政寰戴鴻名王立康湯學成
學位類別：	博士 Doctor
系所名稱：	工學院 - 動力機械工程學系 Department of Power Mechanical Engineering
論文出版年：	2015
畢業學年度：	103
語文別：	英文
論文頁數：	144
中文關鍵詞：	差分干涉對比術、渥拉斯頓稜鏡、相移術、定量化相位還原、表面形貌、透明物件
外文關鍵詞：	Differential Interference Contrast (DIC), Nomarski prism, phase shifting, quantitative phase restoration, topography, transparent specimen
相關次數：	點閱：3 下載：0
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近年來光電顯示產品大量使用多種透明材質的基板及表面薄膜結構，為了滿足製程監控與品質的要求，對此類元件有大量的精密量測需求。在生物醫學領域中，對於高透光率的細胞微結構觀察，亦需要定量化且即時的動態檢測技術。因此建立一套可量測透明物件形貌尺寸的光學系統，達成高速、高精度的三維形貌量測技術為一大關鍵。
本研究以相位移式差分干涉對比(Phase shifting differential interference contrast, PS-DIC)技術為核心，結合定量化相位還原演算法開發一套三維形貌量測系統。首先，本研究驗證採用差分干涉對比技術於階高形貌量測的可行性，並提出修正型傅立葉相位積分(modified Fourier phase integration, MFPI)重建演算法，提升重建相位的精確度，降低定量化相位還原過程的誤差，並解決雜訊及邊界條件問題。接著，設計開發一套相位移式差分干涉對比量測系統，並提出誤差補償及校正方法，以提升形貌量測精度。另外，為了加速量測速度以符合即時動態檢測的需求，提出適用於穿透式差分干涉對比量測系統的二步相位移方法來縮短量測流程。最後，探討所開發的光程差量測系統對於測量不同幾何形狀透明待測物的情形及測量生物細胞等樣品的應用。

Various transparent components are recently used in numerous optoelectronic devices. As to ensure the product quality, there is an increasing demand for precision profile measurement of these transparent objects. For biological application, quantitative real-time phase measurement of cells with high transmittance is also a popular issue. Therefore, developing a three-dimensional topography measurement system with high speed and high precision for measuring transparent specimens become important.
In this study, a phase shifting differential interference contrast (PS-DIC) topography measurement system with quantitative phase restoration method is developed. First, the feasibility of measuring step height specimen through the DIC technique is studied. A modified Fourier phase integration (MFPI) method is proposed to improve the profile reconstruction precision and reduce the effects of noise. Secondly, a PS-DIC measurement system is designed and developed. The error compensation methods and calibration process are also presented. Then a speed up two step phase shifting algorithm is proposed to accelerate the measuring speed of the system for industrial real-time measurement purpose. Moreover, effects of various specimen geometries on profile measurement precision and optical path difference measurement for biological applications are studied.

摘要                        I
Abstract                    II
Acknowledgement                    III
Table of Contents                IV
List of Tables                    VI
List of Figures                    VII
Introduction                    1
1 Background                    1
2 Problem statement                2
3 Objectives of study            3
Literature Reviews                7
1 Fundamentals of Differential Interference Contrast Technique    7
2 Quantitative DIC measurement        14
3 Phase integration methods            15
4 Phase shifting methods            19
4.1 Phase shifting algorithms        19
4.2 Simultaneous phase shifting mechanisms    20
5 Measurement of specimen with various geometries    23
6 Other DIC methods                24
7 Summary                    31
Quantitative Phase Integration Method        32
1 Quantitative DIC measurement system        34
2 Modified Fourier Phase Integration        37
3 MFPI with anti-symmetric derivative        46
4 Verification of the MFPI approach with experiments    51
Development of PS-DIC System            54
1 Development of PS-DIC system        54
2 Error compensation of the PS-DIC system    61
2.1 Systematic error: background phase gradient    62
2.2 Random error: offset            62
3. Quantitative phase calibration        67
3.1 Measuring shear                67
3.2 Characterizing test samples for calibration    69
3.3 Effects of illumination intensity    72
4. System testing                73
Phase Shifting Technique for PS-DIC System    79
1 Proposed PS-DIC technique            80
2 Evaluation of the proposed phase shifting algorithm    84
Various Specimen Measurements            93
1 Tests of Specimen with Inclined Surface    94
2 Water Immersion PS-DIC technique        109
3. Biological specimen measurement        125
Conclusions                    132
1 Contributions of this dissertation        132
2 Recommendations                134
Reference                    137
                                

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