本論文開發新穎的超音波奈米轉印技術及機台，以超音波取代一般奈米轉印之加熱源，使得轉印之聚合物受熱軟化或融化，將模仁的圖案成功地轉印至聚合物上，解決傳統熱壓式奈米轉印之加熱、冷卻循環的熱損失及時間損耗問題。本論文中超音波振動的產生主要是藉由三明治結構的換能器；壓電陶瓷圓盤夾在二個鋁金屬塊中間，再藉由放大器及喇叭的傳遞，最後透過模仁使得聚合物因為超音波振動受熱而變形。此外利用數值模擬軟體CDF-RC，探討模仁幾何尺寸與聚合物厚度對於超音波奈米轉印之填充流動的影響，由於此問題具有多重物理量之耦合且複雜，所以本文將模擬的問題簡化並且分成兩個部份探討：一是超音波振動對聚合物產生的溫度分佈及流動模擬，一是聚合物在等溫環境下填充變形及速度分佈模擬。結合兩個部份的模擬結果，可以推論超音波奈米轉印下聚合物的流動行為。另外，藉由自行開發設計的機台進行奈米轉印實驗，實驗結果顯示超音波振動的能量可以透過模仁傳遞至聚合物，使模仁上的圖案轉印至聚合物。本論文提出的新穎的奈米轉印方法—超音波奈米轉印技術具有潛力成為高生產力、節能且便宜的奈米加工技術。

In this study, we report an ultrasonic nanoimprint lithography (U-NIL) method which can overcome the drawbacks of energy consumption and long process time occurred in conventional NIL methods. Instead of using heaters in conventional NIL, the proposed U-NIL employs an ultrasonic source located on the top of mold to generate high frequency vibration causing the increase of temperature to soften and to melt the thermoplastic polymer. The ultrasonic source is induced by the transducer consisting of a number of piezoelectric ceramic discs, sandwiched between two aluminum metal blocks. A novel ultrasonic NIL technology and ultrasonic imprinted machine have been developed and set up. To investigate the effects of imprinted resist thickness and mold geometries on the polymer flow and the temperature distribution of U-NIL through numerical have been simulated. In simulations, the velocity fields in imprinting stage and the temperature distributions in ultrasonic vibrations are performed under the variations of convexity width, cavity width, and thickness of imprinted polymer resist. Moreover, the combined effects of the imprinting stage and ultrasonic vibrations in U-NIL process are discussed. The experimental results demonstrated that vibratory energy could be concentrated in transferring the topography of mold’s surface into the polymer. We conclude that the proposed U-NIL process has the potential to become a novel nanoimprinting method.

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