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研究生: 邱志杰
Chih-Chieh Chiu
論文名稱: 嵌入式金屬-氮化矽-氧化層低溫複晶矽薄膜非揮發性記憶體在系統化面板上之應用
System-On-Panel Applications with Embedded Metal-Nitride-Oxide LTPS TFT Nonvolatile Memory
指導教授: 金雅琴
Ya-Chin King
林崇榮
Chrong-Jung Lin
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 93
中文關鍵詞: 製程相容金屬-氮化矽-氧化層低溫複晶矽薄膜電晶體單次寫入記憶體
外文關鍵詞: Fully-compatible, Metal-nitride-oxide (MNOS), Low-temperature polycrystalline-silicon (LTPS), Thin-film-transistor (TFT), One-time-programmable (OTP)
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  • 本論文提出如何利用堆疊式閘極介電層(金屬-氮化矽-氧化層)之結構,在系統化面板上實現製程相容之非揮發性記憶體。在資料儲存上,此內嵌式N通道金屬-氮化矽-氧化層單次寫入薄膜記憶體可應用在NOR陣列上,透過字元閘及位元端之分壓操作,可提供較高的寫入效率及干擾免疫特性。利用通道FN穿隧電子之寫入,能夠達到低功率輸出及較優異的資料保存特性。本元件對於低溫複晶矽製程而言,可作為一理想的單次寫入記憶體。針對有機發光二極體應用上,本論文提出在不改變傳統的低溫多晶矽驅動畫素電路下,利用新型的電流提升技術來調整P通道薄膜電晶體的臨界電壓值,以促進驅動電流之一致性,使得顯示面板上之亮度不均勻性能在產品測試期間達成修復,不需要任何外部的記憶體或是額外的補償電路。此項技術已成功的在2.4吋之有機發光二極體面板上驗證,達到顯著的修復效果。


    In this study, a nonvolatile memory realized by fully-compatible LTPS process is investigated for various novel applications. For data storage, the embedded N-channel Metal-Nitride-Oxide-Silicon (MNOS) One-Time-Programmable (OTP) cell arranged in a NOR array architecture is demonstrated. Furthermore, fast program efficiency and high disturb immunity are obtained by divided voltages on wordline (WL) and bitline (BL). Through channel FN programming, superior data retention as well as low power operation are therefore achieved. The new embedded MNOS cell has provided a promising one-time-programming memory solution on the LTPS panels’ applications. For AMOLED (Active Matrix Organic Light-Emitting Displays), the proposed innovative current boosting scheme can adjust the threshold voltage level of a P-channel TFT in the OLED driver circuit. Thus, the uniformity of the driving current can be greatly improved without any change on the conventional 2-TFTs and 1-capacitor pixel circuit. The mura recovery of operation can be performed during product testing steps without any external memory modules or additional compensation circuits. This current boosting scheme has been successfully verified in a 2.4-inch AMOLED panel with significant uniformity enhancement.

    摘要 i Abstract ii 誌謝 iii 內文目錄 iv 附圖目錄 vi 表格目錄 x 第一章 序論 1 1.1 研究動機 1 1.2 章節介紹 2 第二章 低溫複晶矽非揮發性記憶體之技術回顧 3 2.1 一次寫入非揮發性記憶體 3 2.1.1 E型複晶矽薄膜可電性程式化記憶體 4 2.1.2 氧化層內嵌奈米矽晶粒可電性程式化記憶體 4 2.2金屬-氮化矽-氧化層低溫複晶矽薄膜電晶體 5 2.2.1 低溫複晶矽電晶體閘極介電層之回顧 5 2.2.2 元件架構 6 2.2.3 薄膜電晶體特性之比較 7 2.3 總結 8 第三章 內嵌式N通道金屬-氮化矽-氧化層單次寫入薄膜記憶體 17 3.1 元件架構 17 3.2 陣列排列方式 18 3.3 元件記憶胞操作 18 3.3.1 編程操作 18 3.3.2 編程特性與儲存層之電荷分佈 19 3.3.3 讀取操作 20 3.4 干擾現象 21 3.4.1 讀取干擾 21 3.4.2 編程干擾 22 3.5 資料保存 22 3.6 總結 23 第四章 P通道金屬-氮化矽-氧化層薄膜記憶體之應用 43 4.1 主動式面板之亮度不均性介紹 43 4.2 主動式有機發光二極體驅動電路之介紹 44 4.2.1 電壓調節式有機發光二極體驅動電路 44 4.2.2 電流鏡式有機發光二極體驅動電路 45 4.2.3 導通電壓補償式有機發光二極體驅動電路 46 4.3 畫素電路架構 47 4.4 電流提升技術 48 4.4.1 驅動電流提升特性 48 4.4.2 面板亮度不均之消除程序 49 4.4.3 脈波電壓漸進式寫入 50 4.4.4 二階段脈波電壓漸進式寫入 50 4.5 資料保存特性 52 4.6 主動式面板亮度不均之修復 52 4.6.1 面板亮度不均之分類 53 4.6.2 亮度均一性檢測結果 53 4.7 總結 55 第五章 結論 90 參考文獻 91

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