本文採用數值與理論方法進行玻璃壓印程序的研究，研究初步利用已知的文獻了解到玻璃的成份、性質、黏度及其機械性質。接著建構玻璃壓印於定溫下時物理模型。數值模擬採用有限元素分析軟體ANSYS Multiphysics 10及其141號流體元素建構模型，模具視為剛體，而玻璃受熱超過其玻璃轉溫度時被視為牛頓黏滯流體。於模擬條件下，壓印速度是主要的輸入參數，而模擬的結果如壓力場於各階段的變化、基材效應、溫度效應及模流形狀等都逐被一探討。

實驗部份是利用實驗室自製熱壓印設備，主要功能是提供定壓及定溫的壓印條件。本論文也成功地展示微、奈米光柵結構的壓印結果，其中填充率及玻璃的流體形狀利用場發射電子顯微鏡加以觀察，其結果和不同加工條件進行討論，如壓印溫度、保壓時間等，實驗和數值模擬結果有很好的一致性，並提供日後實驗上的一個準則。

玻璃壓印是一個實用且有潛力的製程於實務應用上，於實務應用上選擇光通訊中的多通道V型微結構製作，採用自製的熱壓設備及精密的量測儀器進行光通結構熱壓製作與尺寸量測，驗證出製作出高精度微結構的可行性，而最後是本文的結論及未來工作項目的討論。

This thesis presented a theoretical and experimental investigation for the glass imprinting process. The properties, such as composition, viscosity, mechanical strength, of various glass materials were first studied and cross-checked by a broad survey of existing literatures. Then, the physical model for the imprinting process, which features a mold pressed into glass flow at constant temperature, was constructed. The finite element software ANSYS Multiphysics 10.0 and 141 fluid square elements were used in the simulation, which assumed the mold to be rigid and the glass Newtonian flow. In the simulation, the mold imprinting velocity was the major input parameter, the following factors were studied: pressure evolution at various stages, substrate effect, temperature effect, size effect, and flow profile within mold cavity. The experiment was performed by using a labmade hot embossing apparatus, which possessed the functions such as temperature, force, imprinting process controls. In addition, fabrication of micro- and nano-scale silicon molds was illustrated as well. The glass profile and filling ratio in the cavity were observed with an FESEM, on the basis of which, we discussed the temperature, holding time, and pressure distribution. The experimental results were compared with simulation ones, good agreement between them illustrated the FEM simulation was correct and could be employed as guidelines for conducting experiments. The proposed glass imprinting process has potential to be employed in practice. The labmade hot embossing system with precision measurement equipment was used to verify the possibility of precision V-groove channels to support and align optical fibers in fiber array components of optical communication systems. Finally, conclusions were made and future work was pointed out.

[1] 龍文安, “半導體奈米技術”，五南圖書出版公司，2006
[2] Lloyd R. Harriott, “Limits of Lithography”, Proceedings of the IEEE, Vol. 89 (2001), No. 3, pp. 366-374
[3] S. Y. Chou, P. R. Krauss and P. J. Renstrom, “Nanoimprint lithography,” J. of Vacuum and Technology B, Vol. 14 (1996), No. 6, pp. 4129-4133
[4] S. Y. Chou, P. R. Krauss and P. J. Renstrom, “Imprint of sub-25 nm visa ans trenches in polymers” Applied Physics Letters, Vol. 67 (1995), No. 21, pp. 3114-3116
[5] “10 Emerging Technologies That Will Change the World, ” Technology Reviews, 2003
[6] H. Tan, A. Gilbertson and S. Y. Chou, “Roller nanoimprint lithography,” J. of Vacuum Science and Technology B, Vol. 16. (1998), No. 6, pp. 3926-3928
[7] M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C. G. Wilson, “Step and Flash Imprint Lithography: A New Approach to High-Resolution Patterning,” Proceedings of SPIE, Vol. 3676 (1999), pp.379-389
[8] S. Y. Chou, Chirs Keimel and Jian Gu, “Ultrafast and direct imprint of nanostructures in silicon,” Nature, Vol. 417 (2002), pp. 835-837
[9] X. Liang , Wei Zhang, Mingtao Li, Qiangfei Xia, Wei Wu, Haixiong Ge, Xinyu Huang and Stephen Y. Chou “Electrostatic Force-Assisted Nanoimprint Lithograhpy (EFAN), ” Nano Letters, Vol. 5 (2005), No. 3, pp. 527-530
[10] M. C. Cheng, H. Y. Hsiung, Y. L. Hsueh, H. Y. Chen and C. K. Sung, “The effect of thin-film thickness on the formation of metallic patterns by direct nanoimprint process,” J. of Materials Processing Technology, Vol. 101 (2007), No. 1-3, pp. 326-330
[11] C. W. Hsieh, H. Y. Hsiung, Y. T. Lu, C. K. Sung and W. H. Wang, “Fabrication of subwavelength metallic structures by using metal direct imprinting process,” J. of Physics D: Applied Physics, Vol. 40 (2007), pp. 3440-3447
[12] Yoshihiko Hirai, Masaki Fujiwara, Takahiro Okuno, Yoshio Tanaka, “Study of the resist deformation in Nanoimprint lithography”, J. Vac., Sci. Technol. B, Vol. 19(6), 2001
[13] C. R. Lin, R. H. Chen and C. Hung, “The Characterisation and Finite-Element Analysis of a Polymer under Hot Embossing,” Int. J. Adv. Manuf. Technol., Vol. 20 (2002), pp. 230-235
[14] Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa and Satoshi Yoshida, “Simulation and experimental study of polymer deformation in nanoimprinrint lithography”, J. Vacuum Science Technology B, Vol. 22 (2004), No. 6, pp. 3288-3293
[15] Wen-Bin Young, “Analysis of the Nanoimprint lithography with a viscous model”, Microelectronic Engineering, Vol. 77 (2005), pp. 405-411
[16] Harry D Rowland, Amy C Sun, P Randy Schunk and William P King, “Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for Nanoimprint lithography”, J. Micromechanical. Microeng., Vol. 15 (2004), pp. 2414-2425
[17] M. Cheng, S. H. Zhang and J. A. Wert, “Finite element analysis of microimprinting of bulk metallic glasses in supercooled liquid regime,” J. Master Sci., Vol. 42 (2007), pp. 5999-6003
[18] Yu Chung Tsai, Chinghua Hung and Jung Chung Hung, “Glass material model for the forming stage of the glass modeling process,” J. of Materials Processing Technology, Vol. 20 (2008), pp. 751-754
[19] Y. Hirai, K. Kanakugi, T. Yamaguchi, K. Yao, S. Kitagawa, Y. Tanaka, “Fine pattern fabrication on glass surface by imprint lithography”, Microelectronic Engineering, Vol. 67-68 (2003), pp. 237-244
[20] T. Yamaguchi, K. Yao, T. Kanakugi, S. Kitagawa and Y. Hirai, “Fabrication of Micro Optical Elements and Bio-chip Patterns on Glass Surface by Imprint Lithography,” Proceeding of SPIE, Vol. 5515 (2004), pp. 81-87
[21] Yasunori Saotome, Kenichi Imai and Narihito Sawanobori, “Microformability of optical glasses for precision molding,” J. of Materials Processing Technology, Vol. 140 (2003), pp. 379-384
[22] Yasuhisa Tsubouchi, Takehiko Yamugachi, Kazuyuki Yao, Seiichiro Kitagawa and Yoshihiko Hirai, “Fabrication of Micro Optical Elements and Bio-chip Patterns on Glass Surface by Imprint Lithography”, Proceeding of SPIE, Vol 5515 (2004), pp. 81-87
[23] Masaharu Takahashi, Kohichi Sugimoto and Ryutaro Maeda, “Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused Ion Beam Etching”, Japanese Journal of Applied Physics, Vol. 44 (2005), No. 7B, pp. 5600-5605
[24] Hiromichi Takabe, Makoto Kuwabara, Masaharu Komori, Norihito Fukugami, Munehisa Soma and Takahisa Kusuura, “Imprinted optical pattern of low-softening phosphate glass,” Optics Letters, Vol. 32 (2007), No. 18, pp. 2750-2752
[25] Junji Nishii, “Nano-glass imprinting technology for next generation optical devices,” Proceeding of SPIE, Vol. 6834 (2007), pp. 1-8
[26] T. Mori, K, Hasegawa and T. Hatano, ”Surface-relief gratings with high spatial frequency fabricated using direct glass imprinting Process,” Optics Letters, Vol. 33, No. 5 (2008) , pp. 428-430
[27] Graham LW Cross, “The production of nanostructures by mechanical forming, ” J. Phys. D: Appl. Phys., No. 39 (2006), pp. 363-386
[28] Horst Scholze, “Glass – Nature, Structure and Properties”, Springer-Verlag publishing, 1991
[29] J. Hlavac, “The Technology of Glass and Ceramics An Introduction”, Elsevier Sci. publishing, 1983
[30] D. R. Uhlmann and N. J. Kreidl, “Glass Science and Technology”, Academic Press publishing, 1986
[31] William D. Callister, “Materials Science and Engineering An Introduction”, John Wiley & Sons Inc. publishing, 2003
[32] J. M. Haile, “Molecular Dynamics Simulation – Elementary Methods,” Wiley Interscience publishing, 1997
[33] Samuel R. Scholes, “Modern Glass Practice”, Cahners Books publishing, 1975
[34] Robert H. Doremus, “Glass Science”, John Wiely & Sons Inc. publishing, 1994
[35] On-line helps, Ansys Multiphysics Version 11
[36] Robert D. Cook, David S. Malkus, Michael E. Plesha and Robert J. Witt, “Concept and Application of Finite Element, “ Wiley publishing, 2001
[37] 林昭仁，”薄膜流技術”，高立圖書有限公司，2005
[38] I. M. Smith and D.V. Griffiths, “Programming The Finite Element Method, “ John Wiley & Sons Inc. publishing, 1998
[39] T. Belytchko, W. K. Liu and B. Moran, “Nonlinear Finite Elements for Continua and Structures”, published John Wiley & Sons, LTD., 2000
[40] Chih-Wei Hsieh, “Investigation into Formation and Friction effect in Direct Nanoimprint: Molecular Dynamics Analysis and Experiment”, Doctoral Thesis, National Tsing Hwa University Taiwan R.O.C, 2008
[41] Ranjana Saha and William D. Nix, “Effects of the substrate on the determination of thin film mechanical properties by nanoindentation,” Acta Material, Vol. 50 (2002), pp. 23-38
[42] Ming Chieh Cheng, Hsin Yi Hsiung, Ying Ti Lu and Cheng Kuo Sung, “The Effect of Metal-Film Thickness on Pattern Formation by Using Direct Imprint”, Japanese J. of Applied Physics, Vol. 46 (2007), No. 9B, pp. 6382-6386
[43] “Optics Glass Data Book,” Sumita Optical Glass Inc. publishing, 2007
[44] J. H. Chang, S. Y. Yang, “Gas pressurized hot embossing for transcription of micro feature”, Microsystem Technologies, Vol. 10 (2003), pp.76-80
[45] Yasunori Saotome and Kenichi Imai, “The micro nanoformability of Zr-based amorphous alloys in The supercooled liquid state and their applications to micro- dies”, J. of Materials Processing Technology, Vol. 113 (2001), pp. 64-69
[46] Lars Montelius, Babak Heidari and Thord Stjernholm, “Device for Transferring a Pattern To An Object, “ United States Patent, No. 0170051 (2003)
[47] B. J. Choi and S. V. Sreenivasan, S. Johnson, M. Colburn and C. G. Wilson, “Design of orientation stages for step and flash imprint lithography, “ Precision Engineering, Vol. 25 (2001), pp. 192-199
[48] D. M. Auslander, J. R. Ridgely and J. D. Ringgenberg, “Control Software for Mechanical Systems”, Prentice Hall PTR publishing, 2002
[49] Miro Samek, “Practical Statecharts in C/C++”, CMP Books publishing, 2002
[50] Gonzalez Woods, “Digital Image Processing”, Prentice Hall publishing, 2002
[51] Ramesh Jain, Rangachar Kasturi and Brian G. Schunck, “ Machine Vision,” McGraw-Hill International Editions publishing, 1995.
[52] Wesley E. Snyder and Hairong, “Machine Vision”, Cambridge pubishing, 2004
[53] Milan Sonka, Vaclav Hlavac and Roger Boyle, “Image Processing, Analysis and Machine Vision”, PWS publishing, 1999
[54] http://www.jeol.com
[55] H. Rawson, “Properties and Applications of Glass, “ Elservier publishing, 1980
[56] Djafar K. Mynbaev and Lowell L. Scheiner, “Fiber-Optics Communications Technology,” Prentice Hall publishing, 2000
[57] J. H. Lee, S. R. Park, S. H. Yang and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. of Materials Processing Technology, Vol.155-156 (2004), pp.1716-1722
[58] K. M. Nowak, H. J. Baker, D. R. Hall, X. Liu and A. Bell, “Low-loss passive alignment of single mode fibers in low-temperature cofired ceramics using CO2 laser fabricated U-grooves,” Applied Optics, Vol. 45 (2006), No. 36, pp. 9168-9175
[59] Sung Won Youn, Masaharu Takahashi, Hiroshi Goto and Ryutaro Maeda, “A study on focused ion beam milling of glassy carbon molds for thermal imprinting of quartz and borosilicate glasses”, J. of Micromechanics Microengineering, Vol. 16 (2006), pp. 2576-2584
[60] S. W. Youn, M. Takahashi, H, Goto and R. Maeda, “Microstructuring of glassy carbon mold for glass embossing – Comparison of focused ion beam, nano/fetosecond-plused laser and mechanical machining, “ Microelectronic Engineering, Vol. 83 (2006), pp. 2482-2492
[61] J. T. Kim, K. B. Yoon and C. G. Choi, “Passive Alignment Method of Polymer PLC Device by Using a Hot Embossing Technique”, IEEE Photonics Tech. Letters, Vol. 16, No. 7, 2004, pp. 1664-1666
[62] M. Takahashi, T. Ido and T. Nagara, “A Polymer PLC Platform With a Fiber-Alignment V-Groove for Low-Cost 10-GbE WWDM Transmitter”, IEEE Photonics Tech. Letters, Vol. 16, No.1 2004, pp. 266-268
[63] Kuniaki Ishihara, Masayuki Fujta, Ippei Matsubra, Takashi Asano and Susumu Noda, “Direct Fabricated of Photonic Crystal on Glass Substrate by Nanoimprint Lithography”, Japanese Journal of Applied Physics, Vol. 45, No. 7, 2006
[64] http://www.2spi.com/catalog/mounts/vitreous.html
[65] “Data Sheet”, Schott North America