簡易檢索 / 詳目顯示

研究生: 李佳璇
論文名稱: 奈米銀指叉電極搭配不同微結構氧化鋅膜測試空氣溼度
Measurement of air humidity by nano-silver interdigitated electrode with zinc oxide thin films having different microstructure
指導教授: 周更生
口試委員: 劉鳳錦
段興宇
劉博滔
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 82
中文關鍵詞: 微結構氧化鋅溼度偵測奈米銀電極印章法
相關次數: 點閱:2下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 本研究利用製作圖案印章搭配銀墨水經乾燥及熱處理後,可方便且快速地製作指叉電極。印章尺寸為 27×15mm,電極對數 5 對,長度為 13mm。以印章法製作的電極採用固含量 37.5%、黏度為 6.31cP 之銀墨水製作。蓋印時以 152g 力道(約會使印章下壓 1mm)蓋印,於 280℃下燒結 10 分鐘即可得到指叉電極。0.15毫升之墨水在蓋印力道相同(下壓 1mm)之條件下,一次約可連續蓋印 40~50 個電
    極。
    以 200nm 的棒狀氧化鋅製作而成的不同微結構之氧化鋅膜,測量空氣濕度,可發現比表面積與平均孔徑大小為測量時的重要因素,多種不同微結構中以旋轉塗佈法(500 rpm, 10 sec)製作而成的 20μm 厚度氧化鋅膜,對濕度表現最為良好,空氣濕度自乾燥到飽和狀態,薄膜電性皆有所反應,此微結構之比表面積為 30.8 m2
    /g、平均孔徑大小為 204.5Å ,電阻對濕度關係圖可達到 0.99 的線性關係


    4 目錄 摘 要…………………………………………………………………………………1 Abstract……………………………………………………………………………….2 致謝……………………………………………………………………………………3 圖目錄…………………………………………………………………………………6 表目錄…………………………………………………………………………………9 第一章 前言………………………………………………………………………..10 第二章 基礎原理與文獻回顧 2.1 濕度感測計………………………………………...……………………………12 2.2 氧化鋅…………………………………………………………………………...15 2.3 膜感測器………………………………………………………………………...20 2.4 指叉電極.……..………………………………………………………………....21 第三章 實驗 3.1 實驗藥品………………………………………………………………………...24 3.2 實驗儀器………………………………………………………………………...25 3.3 實驗流程………………………………………………………………………...26 3.3.1 指叉電極之繪製……………….………………………………………...26 3.3.2 氧化鋅粉末製備……….………………………………………………...27 3.3.3 氧化鋅懸浮液的製備…….……………………………………………...28 3.3.4 氧化鋅感濕元件的製備.………………………..……………………….29 3.3.4.1 旋轉塗佈法……………………………………………………….29 3.3.4.2 噴霧塗佈法……………………………………………………….29 3.3.5 空氣濕度偵測流程……….……………………………………………...30 第四章 實驗結果與討論 4.1 印章法製作指叉電極…………………………………………………………...33 4.1.1 印章本體…………………………………………………………………33 4.1.2 銀墨水……………………………………………………………………34 4.1.3 蓋印方式…………………………………………………………………34 4.1.4 以固含量 37.5%之銀墨水蓋印得到指叉電極………………………….36 4.1.5 以固含量 33%之銀墨水蓋印得到指叉電極……………………………40 4.2 氧化鋅粉末及漿料的製備……………………………………………………...45 5 4.3 氧化鋅膜的塗佈與製備………………………………………………………...47 4.3.1 旋轉塗佈法………………………………………………………………47 4.3.2 噴霧塗佈法………………………………………………………………52 4.3.3 加入銀絲之氧化鋅膜……………………………………………………53 4.4 以氧化鋅偵濕元件測試空氣濕度……………………………………………...54 4.5 氧化鋅膜性質…………………………………………………………………...56 4.5.1 以旋轉塗佈法製備之氧化鋅膜性質……………………………………56 4.5.2 以噴霧塗佈法製備之氧化鋅膜性質……………………………………58 4.6 以氧化鋅偵濕元件測試空氣濕度……………………………………………...58 4.6.1 以旋轉塗佈法製備之偵濕元件編號 1~6 測試空氣濕度……………….58 4.6.2 以旋轉塗佈法製備之偵濕元件編號 7 測試空氣濕度………………….69 4.6.3 以噴霧塗佈法製備之氧化鋅偵濕元件測量濕度………………………70 4.6.4 應答時間(response time)……..……………………………….…………71 第五章 結論………………………………………………………………………..74 第六章 參考文獻…………………………………………………………………..75

    75

    第六章 參考文獻

    S. K. N. Ayudhya, and P. Tonto, “Solvothermal Synthesis of ZnO with Various Aspect
    Ratios Using Organic Solvents”, Crystal Growth & Design, 6, 11,
    2446-2450(2006)
    K. Aoki, M. Morita, O. Niwa and H. Tabie, “Quantitative analysis of reversible
    diffusion-controlled currents of redox soluble species at interdigitated array
    electrodes under stady-state conditions”, J. Electroanal. Chem., 256, 269-282
    (1988)
    A. Bratov, N. Abramova, J. Ramon-Azcon, A. Merlos, F. Sanchez-Baeza, M.P. Marco
    and G. Dominguez, “Characterization of the interdigitated electrode array with
    tantalum silicide electrodes separated by insulating barriers,” Electrochem. Comm.,
    10, 10, 1621-1624(2008)
    T. Burgin, V.E. Choong and G. Maracas, “Large area submicrometer contact printing
    using a contact aligner”, Langmuir, 16, 12, 5371-5375(2000)
    Y. Cao, X. Hu, D. Wang, Y. Sun , P. Sun, J. Zheng, J. Ma, and G. Lu, “Flower-like
    hierarchical zinc oxide architectures: Synthesis and gas sensing properties”,
    Materials Letters, 69, 45–47(2012)
    K.S. Chou, Y.C. Chang, and L.H. Chiu, “Studies on the continuous precipitation of
    silver nanoparticles”, I & E C Research, 51, 13, 4905-4910(2012)
    K.S. Chou, T.K. Lee, and F.J. Liu, “Sensing mechanism of a porous ceramic as
    humidity sensor”, Sensors and Actuators B -Chemical, 56, 106-111(1999)
    M. Cavallini, D. Gentili, P. Greco, F. Valle and F. Biscarini, “Micro- and
    nanopatterning by lithographically controlled wetting,” Nature Protocols, 7, 9,
    1668-1676(2012)
    G.N. Chaudhari, M. Alvi, H.G. Wankhade, A.B. Bodade , and Sunkara V. Manorama,
    76

    “Nanocrystalline chemically modified CdIn 2 O 4 thick films for H 2 S gas sensor”,
    Thin Solid Films, 520, 4057–4062(2012)
    A. Cranny, N.R. Harris, M. Nie, J.A. Wharton, R.J. Wood, and K.R. Stoke,
    “Screen-printed potentiometric Ag/AgCl chloride sensors: Lifetime performance
    and their use in soil salt measurements.”, Sensors and Actuators A-Physical, 169,
    288-294(2010)
    R.N. Dean, A. Rane, M. Baginski, Z. Hartzog and D. J. Elton, and PE, “Capacitive
    Fringing Field Sensors in Printed Circuit Board Technology”, Instrμmentation
    and Measurement Technology Conference(I2MTC), 2010 IEEE
    W.A. Dorigo, W. Wagner, and R. Hohensinn, “The International Soil Moisture
    Network: a data hosting facility for global in situ soil moisture measurements”,
    Hydrology and Earth System Sciences, 15, 1675-1698(2011)
    F. Forlani, M. and Prudenziati, ” Electrical Conduction by Percolation in Thick Film
    Resistors”, Electrocomponent Science and Technology, 3, 77-83(1976)
    D. Ganta, E. B. Dale and A. T. Rosenberger, “Measuring sub-nm adsorbed water layer
    thickness and desorption rate using a fused-silica whispering-gallery
    microresonator”, Measurement Science and Technology , 25(2014)
    P.V. Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M.O.D. Beeck, K. Baert, J.
    Suls, W. Sansen, P. Jacobs, L. Hermans and R. Mertens, “Nanoscaled
    interdigitated electrode arrays for biochemical sensors,” Sensors and Actuators B,
    49, no. 1-2, 73-80(1998)
    A. Geupel, D. Schnauer, U. Roder-Roith, D.J. Kubinski, S. Mulla, T.H. Ballinger,
    H.Y. Chen, J.H. Visser and R. Moos, “Integrating nitrogen oxide sensor: a novel
    concept for measuring low concentration in the exhaust gas”, Sensors and
    Actuators B: Chem., 145, 2, 756-761(2010).
    J. Gupta, K.C. Barick, and D. Bahadur, “Defect mediated photocatalytic activity in
    77

    shape-controlled ZnO nanostructures”, Journal of Alloys and Compounds, 509,
    6725–6730(2011)
    O. Harnack, C. Pacholski, H. Weller, A. Yasuda, and J. Wessels, “Rectifying Behavior
    of Electrically Aligned ZnO Nanorods”, NANO LETTERS, 3, 1097-1101(2003)
    A. Hideji, and A. Yasuo, “Improvement of response characteristics of TiO 2 humidity
    sensors by simultaneous addition of Li 2 O and V 2 O 5 ” Ceramics International, 34,
    819–822(2008)
    H.T. Hsueh, T.J. Hsueh, and S.J. Chang, “CuO nanowire-based humidity sensors
    prepared on glass substrate”, Sensors and Actuators B, 156, 906-911(2011)
    H. Kim, R.C.Y. Auyeung, S.H. Lee, A.L. Huston1 and A. Piqu´e1, “Laser-printed
    interdigitated Ag electrodes for organic thin film transistors”, J. Phys. D: Appl.
    Phys., 43, 085101(2010)
    J.H. Kim, B.M. Moon and S.M. Hong, “Capacitive humidity sensors based on a
    newly designed interdigitated electrode structure,” Microsyst. Technol., 18, 1,
    31-35(2012)
    M. Kulkarni, A. Viswanath, and P. Khanna, “Synthesis and humidity sensing
    properties of conducting poly(N-methyl aniline) doped with different acids”,
    Sensors and Actuators B, 115, 140–149(2006)
    C.Y. Lee, G.W. Wu, and W.J. Hsieh, “Fabrication of micro sensors on a flexible
    substrate”, Sensors and Actuators A, 147, 173–176(2008)
    C.Y. Lee, and C.M. Chiang, “A self-heating gas sensor with integrated NiO thin-film
    for formaldehyde detection”, Sensors and Actuators B, 122, 503–510 (2007)
    H. Lee, S. Lee, S. Jung, and J. Lee, “Nano-grass polyimide-based humidity sensors”,
    Sensors and Actuators B, 154, 2–8(2011)
    H.H. Lee, K.S. Chou, and K.C. Huang, “Inkjet printing of nanosized silver colloids”,
    Nanotechnology, 16, 2436(2005)
    78

    L.J. Golonka, B.W. Licznerski, K. Nitsch, H. Teterycz, “Thick-film humidity sensors”,
    Meas. Sci. Technol., 8, 92–98(1997)
    H. Liu, M. Agarwal, and K. Varahramyan, “Polymer-based microsensor for soil
    moisture measurement”, Sensors and Actuators B -Chemical, 129,
    599-604(2008)
    J. Liu, M. Agarwal, K. Varahramyan, E.S. Berney IV, and W.D. Hodo,
    “Polymer-based microsensor for soil moisture measurement”, Sensors and
    Actuators B, 129, 599–604(2008)
    Y. Liu, E. Koep, and M. Liu, “A Highly Sensitive and Fast-Responding SnO 2 Sensor
    Fabricated by Combustion Chemical Vapor Deposition”, Chem. Mater., 17,
    3997-4000(2005)
    E.S. Matveeva, “Residual water as a factor influencing the electrical properties of
    polyaniline. The role of hydrogen bonding of the polymer with solvent molecules
    in the formation of a conductive polymeric network”, Synthetic Metals, 79,
    127-139 (1996)
    A. Miller, and E. Abrahams, "Impurity conduction at low concentrations", Phys. Rev.,
    120, 745(1960)
    L. Montelius, B. Heidari, M. Graczyk, I. Maximov, E-L. Sarwe and T. G. I. Ling,
    “Nanoimprint- and UV-lithography: Mix&Match process for fabrication of
    interdigitated nanobiosensors”, Microelectronic Engineering, 53, 521-524(2008)
    K.T. Nam, R. Wartena, P.J. Yoo, F.W. Liau, Y.J. Lee, Y.M. Chiang, P.T. Hammond and
    A.M. Belcher, “Stamped microbattery electrodes based on self-assembled M13
    virus”, Proc. Nat. Acad. Sci. USA, 105, 35, 17227-17231(2008)
    D.P. Norton, Y.W. Heo, M.P. Ivill, K. Ip, S.J. Pearton, M.F. Chisholm, and T. Steiner,
    “ZnO: growth, doping & processing”, materials today, 7, 6, 34-40(2004)
    C. Pacholski, A. Kornowski, and H. Weller, “Self-Assembly of ZnO: From Nanodots
    79

    to Nanorods”, Angew. Chem. Int. Ed., 41(2002)
    N. Pandey, K. Tiwari, and A. Roy, “Moisture Sensing Application of Cu 2 O Doped
    ZnO Nanocomposites”, IEEE Sensors Journal, 11, 9, 2142-2148(2011)
    C. Park, T. Kwon, B. Kim, J.H. Lee, S.H. Ahn, M.K. Ju, N. Balaji. H.J. Lee and J.S.
    Yi, “Front-side metal electrode optimization using fine line double screen printing
    and nickel plating for large area crystalline silicon solar cell,” Mater. Res. Bull., 47,
    10, 3027-3031(2012)
    M.S. Park, T.H. Lim, and Y.M. Jeon, “Preparation of New Polyelectrolyte/ Silver
    Nanocomposites and Their Humidity-Sensitive Properties”, Macromolecular
    Research, 16, 308-313(2008)
    Q. Qi, T. Zhang, and Y. Zeng, “Humidity sensing properties of KCl-doped ZnO
    nanofibers with super-rapid response and recovery”, Sensors and Actuators B
    B-Chemical, 137, 21-26 (2009)
    Q. Qi, T. Zhang, Y. Zeng, and H. Yang, “Humidity sensing properties of KCl-doped
    Cu–Zn/CuO–ZnO nanoparticles”, Sensors and Actuators B, 137, 21-26 (2009)
    Q. Qi., T. Zhang, Q. Yu, R. Wang, Y. Zeng, L. Liu, and H. Yang, “Properties of
    humidity sensing ZnO nanorods-base sensor fabricated by screen-printing”,
    Sensors and Actuators B, 133, 638–643 (2008)
    W. Qu, and J.U. Meyer, “A novel thick-film ceramic humidity sensor”, Sensors and
    Actuators B, 40, 175-182(1997)
    S.M. Radke and E.C. Alocilja. “A high density microelectrode array biosensor for
    detection of E. coli O157:H7,” Biosensors and Bioelectronics, 20, 8,
    1662-1667(2005)
    K.V. Singh, A.M. Whited, Y. Ragineni, T.W. Barrett, J. King, and R. Solanki, “3D
    nanogap interdigitated electrode array biosensors”, Anal Bioanal Chem., 397,
    1493-1502(2010)
    80

    J. Shah, R.K. Kotnala, and B. Singh, “Microstructure-dependent humidity sensitivity
    of porous MgFe 2 O 4 –CeO 2 ceramic”, Sensors and Actuators B -Chemical, 128,
    306-311(2007)
    A.L. Sharma, “Electrochemical synthesis of poly(aniline-co-fluoroaniline) films and
    their application as humidity sensing material”, Thin Solid Films, 517, 3350–
    3356(2009)
    D.I. Shuman, A. Nayyar, and A. Mahajan, “Measurement Scheduling for Soil
    Moisture Sensing: From Physical Models to Optimal Control”, Proceedings of
    the IEEE, 98, 1918-1933(2010)
    M. Spencer, “Gas sensing applications of 1D-nanostructured zinc oxide: Insights from
    density functional theory calculations”, Progress in Materials Science, 57,
    437-486(2012)
    B. Takayuki, S. Tomoyuki, and O. Yutaka, “Synthesis of zinc oxide crystals with
    different shapes from zincate aqueous solutions stabilized with triethanolamine”,
    Cryst. Res. Technol., 42, 9, 849 – 855(2007)
    J. Tamaki, T. Hashishin, Y. Udo, D.V. Dao and S. Sugiyama, “Ultrahigh-sensitive
    WO 3 nanosensor with interdigitated Au nano-electrode for NO 2 detection”,
    Sensors and Actuators B, 132, 234–238(2008)
    F. Tang, Y. Sakka, and T. Uchikoshi, “Electrophoretic Deposition Behavior of
    Aqueous Nanosized Zinc Oxide Suspensions”, Materials Research Bulletin, 38,
    207-212(2003)
    W.C. Tian, Y.H. Ho, C.H. Chen and C.Y. Kuo, “Sensing performance of precisely
    ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography,”
    Sensors, 13, 1, 865-874(2013)
    C.Y. Tsay, K.S. Fan, and C.M. Lei, “Synthesis and characterization of sol–gel derived
    gallium-doped zinc oxide thin films”, Journal of Alloys and Compounds, 512,
    81

    216–222(2012)
    C.C. Tseng, Y.H. Chou, T.W. Hsieh, M.W. Wang, Y.Y. Hsu and M.D. Ger,
    “Interdigitated electrode fabricated by integration of ink-jet printing with
    electroless plating and its application in gas sensor”, Colloids and Surf. A:
    Physicochem. Eng. Aspects, 402, 45-52(2012)
    J.M. Tulliani, , A. Cavalieri , S. Musso , E. Sardella , and F. Geobaldo, “Room
    temperature ammonia sensors based on zinc oxide and functionalized graphite
    and multi-walled carbon nanotubes”, Sensors and Actuators B, 152,
    144-154(2011)
    S.K. Tzeng, M.H. Hon, and I.C. Leu, “Preparation of ZnO Nanowires by a
    Hydrothermal Process and the Performance of Nanowire-based UV
    Photodetectors”, International Journal of Science and Engineering, 1,
    11-16(2011)
    L. Wang, Y. He, J. Hu, Q. Qi , and T. Zhang, “DC humidity sensing properties of
    BaTiO3 nanofiber sensors with different electrode materials”, Sensors and
    Actuators B, 153, 460–464(2011)
    J.R. Williams, and E.I. Lord, “The use of porous ceramic cup water samplers to
    measure solute leaching on chalk soils”, Soil Use and Management, 13,
    156-162(1997)
    Y.N. Xia, P.D. Yang, Y.G. Sun, Y.Y. Wu, B. Mayers, B. Gates, Y.D. Yin, F. Kim, and
    Y.Q. Yan, “One-dimensional nanostructures: synthesis, characterization, and
    applications”, Adv. Mater., 15, 353–389(2003)
    Y. Xia, P. Yang, Y. Sun, Y. Wu, B. Mayers, B. Gates, Y. Yin, F. Kim, and H. Yan,
    “One-dimensional nanostructures: Synthesis, Characterization, and Applications”,
    advanced materials, 15, 353-389(2003)
    B.C. Yadav, R. Srivastava, C.D. Dwivedi, and P. Pramanik, “Moisture sensor based on
    82

    ZnO nanomaterial synthesized through oxalate route”, Sensors and Actuators B,
    131, 216–222(2008)
    A. Yu, J. Qian, H. Pan, Y. Cui, M. Xu, L. Tu, Q. Chai, and X. Zhou, ” Micro-lotus
    constructed by Fe-doped ZnO hierarchically porous nanosheets: Preparation,
    characterization and gas sensing property”, Sensors and Actuators B, 158, 9-16
    (2011)
    H. Zhang, Z. Li, W. Wang, and C. Wang, “Na +
    -Doped Zinc Oxide Nanofiber
    Membrane for High Speed Humidity Sensor”, Journal of the American Ceramic
    Society, 93, 142-146(2010)
    Z. Zou, J. Kai, M. J. Rust, J. Han, and C.H. Ahn, “Functionalized nano interdigitated
    electrodes arrays on polymer with integrated microfluidics for direct bio-affinity
    sensing using impedimetric measurement”, Sensors and Actuators A, 136, 518–
    526(2007)
    李坤易,「高感度葡萄糖生物感測器之研究」,國立雲林科技大學化學工程系碩士
    論文(2006)
    李易珊,「指叉電容式生物感測器」,國立中央大學電機工程學系碩士論文(2010)
    張鈺淳,「連續式生成奈米銀顆粒及其在導線繪圖上之應用」,國立清華大學化學
    工程研究所碩士論文(2012)
    洪健彰,「以有機無機混成材料(AMPS/SiO 2 )製備阻抗式濕度感測器之研究」,私
    立中原大學化學工程研究所碩士論文(2002)
    施正雄,「化學感測器專題報導簡介」,中國化學會化學季刊,59(2),199-200(2001)

    無法下載圖示 全文公開日期 本全文未授權公開 (校內網路)
    全文公開日期 本全文未授權公開 (校外網路)
    全文公開日期 本全文未授權公開 (國家圖書館:臺灣博碩士論文系統)
    QR CODE