在機器人逐漸發展為取代照護人力的趨勢下，為了要使機器人手部抓取或是操控的動作更為順利，使用的觸覺感測器需要具備剪力感測的能力。在機器人的手部執行任務時，不同手的部位需要承受不同大小的力量，因此具有不同的感測靈敏度的需求。以往在設計感測靈敏度上，通常會設計感測結構的尺寸，但是若是要更改光罩，可能所有製程的光罩都要跟著變更，因此本研究提出一個新的設計參數：利用設計感測結構週遭的腔體尺寸，製作不同剪力感測靈敏度的元件。

Following the trend where many robots have begun replacing the nursing needs, in order to make the movement of robot hand more fluent in grasping and manipulation, there is a requirement that the tactile sensors in their hands should possess the ability to sense shear force. When a robot hand carries out its job, there is a different need of sensing sensitivity on each zone of hand depending on the quantity of force applied. Previous work usually regards size of the sensing structure as a parameter of designing the sensing sensitivity. However, if the design has to be modified, all of the photomasks in fabrication process may be redrawn or disposed. We will propose a new parameter as we make use of the size of the cavity surrounding the sensing structure, and aim to fabricate tactile sensors with different sensing sensitivity.

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