研究生: |
房勵成 Li-ChenFan |
---|---|
論文名稱: |
使用加入薄層之脊狀波導作為一分八分光器之設計 Design of 1×8 ridge-waveguide beam splitter: Incorporating a thin layer in the ridge |
指導教授: |
王立康
Li-Karn Wang |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies |
論文出版年: | 2006 |
畢業學年度: | 94 |
語文別: | 中文 |
論文頁數: | 59 |
中文關鍵詞: | 分光器 、薄層 、一分八 、多模干涉 、傾斜 |
外文關鍵詞: | beam splitter, thin layer, 1 to 8, multi-mode interference, tilted |
相關次數: | 點閱:2 下載:0 |
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由於目前網路附加應用的需求增加,使得光纖網路得以蓬勃發展,加上台灣在半導體工業上的卓越成就,因此利用矽(Si)基板並在其上沈積二氧化矽( )製作導光層與設計光學元件成為當今的主流研究,利用半導體的導光特性加上半導體製程的成熟技術與經驗,使得由半導體製作的光通訊元件能以較低的成本矽(Si)基板取得原料,且利用半導體製程的設備機台得以大量、精準的生產出高品質的產品,且設備機台都可以互相通用,不需額外負擔機台的成本。
本論文主要是在探討在矽晶圓上設計具有高折射率薄膜的MMI分光器(Multi-mode Interference beam splitter),而MMI分光器基本的架構為光波導,因此我們利用目前最具可信度的BPM(Beam Propagation Method)光學軟體來模擬出單模波導的尺寸規格,並以此單模波來設計1×8 MMI分光器,並利用光會向高折射率的區域集中的特性,探討在脊狀波導中加入高折射率薄膜的特性,並探討波導中加入或不加入薄膜所造成的分光損失(excess losss)、彎曲損失(bending loss),以及探討光纖更波導因為模態的不匹配所造成的耦合損失(coupling loss),並針對這些損失來著手改善,以期能夠設計出最低損失的1×8分光器。
接著想進一步減短1×8分光器的長度,以達到減少成本、微小化、簡化製程可量產的目標;我們利用3層1×2分光器堆疊擺放來完成1×8分光器,所以我們將MMI分光器以傾斜擺放的方式,這樣可以減少1×2分光器間連接的距離,使得整體1×8分光器尺吋大小得以減少。
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