研究生: |
蘇信政 Su, Hsin-Cheng |
---|---|
論文名稱: |
氧化鋅奈米線的製備探討與選區成長 Fabrication and selective growth of ZnO nanowires |
指導教授: |
陳榮順
Chen, Rongshun 林建宏 Lin, Chien-Hung |
口試委員: |
陳宗麟
Chen, Tsung-Lin |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 動力機械工程學系 Department of Power Mechanical Engineering |
論文出版年: | 2011 |
畢業學年度: | 99 |
語文別: | 中文 |
論文頁數: | 79 |
中文關鍵詞: | 氧化鋅奈米線 、微接觸微影法 、選區成長 |
外文關鍵詞: | ZnO nanowires, Microcontact printing, Selective growth |
相關次數: | 點閱:2 下載:0 |
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氧化鋅奈米線擁有豐富的特性,因此許多的研究致力於開發其應用價值,並且有極高的潛力可取代市售產品之材料使用,其中控制成長與選區成長是可以使氧化鋅奈米線進入產品化的重要因素。
本研究利用氣液固成長法於矽基板及藍寶石基板成功合成出氧化鋅奈米線,並探討不同製程參數對合成奈米線之影響,探討的製程參數如基板、金薄膜厚度、反應溫度、腔體壓力、基板位置以及持溫時間的影響,觀察氧化鋅奈米線的線徑、長度及形貌,整理歸納成長趨勢以及成長機制。
而選區成長部分,則是使用選用微接觸微影法定義金薄膜圖形,隨後以氣液固法成長氧化鋅奈米線,並根據成長趨勢探討,調整製程條件以改變奈米線之外觀尺寸,即可達到選區成長及控制成長之目的。
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